The MAMINA group

Callens-Debavelaere (MC), P. Campistron (MC), J. Carlier (Pr), E. Cattan (Pr), S. Ghenna (MC), S. Grondel (Pr), F. Lefebvre (MC), G. Nassar (MC-HDR), F. Ponchel (MC), D. Remiens (Pr), C. Soyer (MC). Post-doctoral fellows : E. Uygun, A. Itawi. Doctoral students :  V. Becquer, M. de La Bigne, O. Gallardo Luna, W. J. Liu, A. Salhab, L. Sauze, M. Sawan

Presentation of the group

The objectives of the MAMINA group (Materials and Acoustics for Integrated MIcro and NAno systems) are on the one hand, to develop materials  of the thin film, polymer, or composite type using electro-active or piezoelectric effects and on the other hand, to show our ability to integrate them into micro-structures for applications requiring  micro or nanosystems.

Based on these active materials, MAMINA innovates in different fields: detection and characterization by high frequency acoustic waves up to micrometer and nanometer scales, energy recovery and storage, localized actuation (MEMS and acoustic waves), bioinspired microsystems.

The specificities of MAMINA

The specificities of the MAMINA group thus focus on the development of ferroelectric and piezoelectric materials by the sputtering technique. In addition to this growth aspect, the films are characterized both from the physico-chemical and the electrical point of view. An important part of the research is devoted to the integration of these materials in micro- or nano-systems. In addition, specific experiments have been developed in order to determine the ferroelectric and piezoelectric properties as a function of temperature and as a function of a controlled mechanical stress.


All of these tools have contributed to the development of several classes of functional materials that have then been optimized to address different fields of application. Thus, one of the research topics concerns the growth and qualification of tunable ferroelectric materials dedicated to microwave applications for modern telecommunications (tunable Hairpin filter, tunable impedance adapter).

Materials with anti-ferroelectric properties are also developed on the topic of energy storage (improvement of stored energy density). More recently we are interested in the synthesis of artificial multiferroic systems that exhibit both ferromagnetic and ferroelectric properties.

A magneto-electric coupling has been demonstrated and now allows us to consider the design of components such as electric field drivable inductors. Recently composites (ceramics/polymers) have been realized based on eco-acceptable materials for ultrasonic transducer applications (sensors and actuators).

In addition, research is directed towards the integration of new transducer materials based on electroactive conductive polymers and interpenetrating polymer networks. These electroactive materials are for the first time integrated at the micrometer scale in flexible microstructures. Electrical and physicochemical characterizations are performed in order to determine in particular the blocking forces and the maximum deformations under the action of an electrical voltage. The sensor mode of these materials is simultaneously studied.


Significant developments have been made to model these materials in order to subsequently associate them with the simulation of systems or subsystems. The performance of these integrated materials allows us to consider applications in the health field.

The research of the MAMINA group is also oriented towards bioinspired microstructures such as the realization of an insect mimicking flying object (OVMI). More precisely, it is a structure with characteristics close to those of flying insects that we wish to make take off and hover using the same principles of wing movement as those deployed in nature.

The microstructure is achieved by microfabrication technologies and is almost completely flexible. The wings have ribs of 40µm diameter and membranes with a thickness of half a micrometer.

Preliminary modeling is being done based on an original concept that generates both flapping and twisting motion of the wings using a single electromagnetic actuator. To date, this is the smallest and lightest nano drone in the world and currently the prototype produces a lift force slightly greater than its own weight.

A final focus in the group is on integrated acoustic transducers and their applications. In particular, MEMS technologies on silicon have been developed to generate and guide high frequency acoustic waves to develop integrated acoustic microsystems operating in the GHz range.

This therefore concerns the development of high-frequency ultrasonic microtransducers for the characterization of interfaces, fluids but also for studies in the field of biology, and this down to the micrometer and nanometer scales.

The applications concern the study of micro/nanostructured liquid-solid interfaces (STMicroelectronics collaboration), the monitoring of fluid properties (concentration, particle detection, deposition), the integration of transducers in Laboratory on a Chip.

Research activities are thus centered around transducers (electroactive materials), mechanical microstructures and acoustics.