Publicaciones

• Communication dans un congrès

Coupled modes in a rectangular grating

B. Morvan, D. Leduc, J.-L. Izbicki, Anne-Christine Hladky

This work deals with the propagation of ultrasonic Lamb waves in a solid plate with a periodical corrugated interface. The periodicity of the guide implies that the Lamb waves dispersion curves fold back at the edge of the Brillouin zone. For the mini-stop-band, dispersion curves cross and a...

2006 IEEE Ultrasonics Symposium, Oct 2006, Vancouver, BC, Canada. pp.2238-2241, ⟨10.1109/ULTSYM.2006.562⟩. ⟨hal-00147504⟩

• Article dans une revue

Optimisation of HSQ e-beam lithography for the patterning of FinFET transistors

F. Fruleux, J. Penaud, Emmanuel Dubois, M. Francois, M. Muller

FinFET transistors are presented as promising candidates to extend CMOS lifetime. One major challenging technological step in the process fabrication of such devices is the patterning of narrow, sharp, densely packed silicon fins. As an attempt to face this challenge, hydrogen silsesquioxane (HSQ)...

Microelectronic Engineering, 2006, 83, pp.776-779. ⟨10.1016/j.mee.2006.01.159⟩. ⟨hal-00138652⟩

• Article dans une revue

GaAs/polymer optical nanowires : fabrication and characterisation

D. Lauvernier, Sophie Garidel, Malek Zegaoui, Jean-Pierre Vilcot, Didier Decoster

The fabrication and propagation loss measurement of GaAs/polymer optical nanowires are reported. Their design consists of a 300×300 nm cross-section GaAs core buried into a polymer matrix bonded on a Si host substrate. The propagation loss at λ=1.55 μm is measured as about 5 dB/mm for both...

Electronics Letters, 2006, 42 (4), pp.217-219. ⟨10.1049/el:20063869⟩. ⟨hal-00130860⟩

• Article dans une revue

Suppression of the pull-in instability for parallel-plate electrostatic actuators operated in dielectric liquids

Bernard Legrand, Anne-Sophie Rollier, Dominique Collard, Lionel Buchaillot

We study electrostatic parallel-plate actuators operated in dielectric liquids. The stable operation zone of the actuators in common liquids is extended far beyond one-third of the initial gap, which is the typical limit of stability for such actuators operated in air. The pull-in effect can even...

Applied Physics Letters, 2006, 88 (3), pp.034105-1-3. ⟨10.1063/1.2165282⟩. ⟨hal-00128662⟩

• Communication dans un congrès

Silicon-based nanofluidic devices for the handling of liquids at attolitre volumes

C. Descatoire, L. Buchaillot, S. Arscott

European Materials Research Society 2006 Spring Meeting, E-MRS 2006, 2006, Nice, France. ⟨hal-00130858⟩

• Communication dans un congrès

Sub-picolitre silicon-based integrated peristaltic micro-pump for applications in laboratory-on-a-chip

M. Gaudet, S. Arscott, J.C. Camart, L. Buchaillot

European Materials Research Society 2006 Spring Meeting, E-MRS 2006, 2006, Nice, France. ⟨hal-00130859⟩

• Communication dans un congrès

Composants photoniques passifs en technologie microguide sur InP : conception, fabrication et caracterisation

Marie Lesecq, Sophie Maricot, Jean-Pierre Vilcot

11èmes Journées Nano-Micro Electronique et Optoélectronique, JNMO 2006, 2006, Aussois, France. ⟨hal-00130874⟩

• Communication dans un congrès

Mechanical cross-characterization of sputtered Inconel thin films for MEMS applications

G. Fleury, C. Malhaire, C. Populaire, M. Verdier, Arnaud Devos, P. Charvet, J.P. Polizzi

Proceedings of the 2006 European Material Research Society Spring Meeting, 2006, Nice, France. ⟨hal-00369948⟩

• Communication dans un congrès

Time dependent Ginzburg-Landau approach of the switching mecanism in low dimensionnal ferroelectric systems

Laurent Baudry

7èmes Journées Couches Minces Ferroélectriques, 4ème Rencontre Franco-Ukrainienne sur la Ferroélectricité, JCF2006-RFUF4, 2006, Amiens, France. ⟨hal-00247426⟩

• Communication dans un congrès

Quantification of the longitudinal force necessary to detach osteoblastic cells from a glass substrate using ultrasounds

L. Peyre, Dorothée Debavelaere-Callens, A. Lefebvre, H.F. Hildebrand

European Materials Research Society Fall Meeting, Symposium on Surface Functionalization and Activation of Biomaterials, 2006, Poland. pp.221-222. ⟨hal-00247424⟩