Publicaciones

• Article dans une revue

Reactive ion etching of a 20 nanometers tungsten gate using a SF$_6$/N$_2$ chemistry and hydrogen silsesquioxane hard mask resist

G. Larrieu, Emmanuel Dubois

This article reports on a direct method for patterning a tungsten gate in the decananometric range using high-resolution electron-beam lithography and reactive ion etching (RIE). Electron-beam lithography is based on the use of hydrogen silsesquioxane for its remarkable properties as a negative-...

Journal of Vacuum Science and Technology, 2005, 23 (5), pp.2046-2050. ⟨10.1116/1.2050654⟩. ⟨hal-00125635⟩

• Communication dans un congrès

Piezoelectric micro-machined ultrasonic transducer (pMUT) for energy harvesting

Karim Dogheche, B. Cavallier, P. Delobelle, L. Hirsinger, S. Ballandras, Eric Cattan, Denis Remiens, M. Marzencki, B. Charlot, Skandar Basrour

Micro-electromechanical devices dedicated to energy scavenging purpose have yield an increasing interest for a few years. In this paper we report on the fabrication of PZT/Si piezoelectric micro-machined ultrasonic transducers (pMUT) first designed to ultrasonic imaging applications that may be...

Ultrasonics Symposium, 18-21 Sept., Sep 2005, Rotterdam, Netherlands. pp.939 - 942, ⟨10.1109/ULTSYM.2005.1603005⟩. ⟨hal-00079975⟩

• Communication dans un congrès

Formation of nano-domains in SAMs of long chain alkyltrichlorosilanes deposited on silicon

S. Desbief, L. Patrone, D. Goguenheim, D. Vuillaume

8th European Conference on Molecular Electronics, ECME8, 2005, Bologna, Italy. ⟨hal-00125600⟩

• Article dans une revue

Terahertz radiation from heavy-ion-irradiated In0.53Ga0.47As photoconductive antenna excited at 1.55 µm

N. Chimot, J. Mangeney, L. Joulaud, P. Crozat, H. Bernas, K. Blary, Jean-Francois Lampin

Applied Physics Letters, 2005, 87, pp.193510-1-3. ⟨hal-00162806⟩

• Autre publication scientifique

Optimisation de la correction de biais dans le récepteur PIC multi-étages pour le système CDMA

M. Moussaoui

2005. ⟨hal-00162808⟩

• Communication dans un congrès

Theory of one-dimensional acoustic wave phase conjugation

A. Merlen, Q. Zhang

IEEE International Ultrasonics Symposium, 2005, Netherlands. pp.2097-2099. ⟨hal-00247436⟩

• Communication dans un congrès

Growth of silicon nanowires over Au nanoparticles supported on high surface oxide substrates

D. Bahloul-Hourlier, D. Luxembourg, D. Stievenard, P. Marecot, A. Addad, E. Payen

NSF-CNRS-IFP Workshop - Future directions in catalysis : nanostructured catalysts, 2005, Lyon, France. ⟨hal-00247493⟩

• Autre publication scientifique

Schémas de modulation et de codage spécifiques pour les communications hauts débits pour les trains à grande vitesse

M. Chennaoui

2005. ⟨hal-00138636⟩

• Communication dans un congrès

Optimisation of HSQ e-beam lithography for the patterning of FinFET transistors

F. Fruleux, J. Penaud, Emmanuel Dubois, M. Francois, M. Muller

2005, pp.9C01. ⟨hal-00138404⟩

• Communication dans un congrès

Impact of the intrinsic parameters of the dielectric on the leakage current

G. Larrieu, M. Tao

2nd International Workshop on Advanced Gate Stack Technology, 2005, Austin, TX, United States. ⟨hal-00138407⟩