Publicaciones

• Communication dans un congrès

Characterization of vertical vibration of electrostatically actuated resonators using Atomic Force Microscope in noncontact mode

Vincent Agache, Bernard Legrand, K. Nakamura, H. Kawakatsu, Lionel Buchaillot, Hiroshi Toshiyoshi, Dominique Collard, Hiroyuki Fujita

Non contact mode atomic force microscope (AFM) direct characterization of out-of-plane fixed-fixed high frequency microelectromechanical resonators is examined while applying the excitation voltage to integrated electrostatic transducers. Non contact mode is rather used than contact mode in order...

The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005, Jun 2005, Seoul, South Korea. pp.2023-2026, ⟨10.1109/SENSOR.2005.1497499⟩. ⟨hal-00125631⟩

• Article dans une revue

Modeling and experimental validation of sharpening mechanism based on thermal oxidation for fabrication of ultra-sharp silicon nanotips

Vincent Agache, Roger Ringot, Patrice Bigotte, Vincent Senez, Bernard Legrand, Lionel Buchaillot, Dominique Collard

This paper aims at modeling the thermal oxidation of silicon pillars leading to the formation of very sharp silicon tips. The model is used to determine optimum process parameters with respect to the initial shape of the silicon pillars and the geometry of the desired tip. The modeling concept is...

IEEE Transactions on Nanotechnology, 2005, 4, pp.548-556. ⟨10.1109/TNANO.2005.851386⟩. ⟨hal-00125632⟩

• Communication dans un congrès

The 2D feedback conveyance with ciliary actuator arrays

M. Ataka, Bernard Legrand, L. Buchaillot, D. Collard, H. Fujita

2005, pp.31-34. ⟨hal-00125659⟩

• Communication dans un congrès

Vers une imagerie par spectrométrie de masse clinique à haut débit

M. Wisztorski, R. Lemaire, O. Jardin-Mathe, C. Courcelle, V. Thomy, J.B. Hendra, P. Ducoroy, M. Salzet, I. Fournier

Journée Innovations en Protéomique, 1ères rencontres du MASTER Protéomique de Lille, 2005, Villeneuve d Ascq, France. ⟨hal-00126223⟩

• Communication dans un congrès

RF blade nano-electromechanical resonator with self-aligned process for definition of lateral electrostatic transducers

Vincent Agache, Bernard Legrand, Dominique Collard, Hiroyuki Fujita, Lionel Buchaillot

In this paper, the design, fabrication, and characterization of a new class of electromechanical resonator based on a blade geometry is proposed. This particular geometry allows self-alignment of the mechanical resonator to its lateral electrodes with nanometer scale lateral gap (<50 nm), while...

Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2005, 2005, Montreux, Switzerland. pp.26-31. ⟨hal-00128656⟩

• Article dans une revue

Design of microstrip to waveguide transition in the W band suitable antenna or integrated circuits connections

B.D. Nguyen, Claire Migliaccio, Christian Pichot, N. Rolland

This paper presents a millimeter waveguide-to-microstrip line transition based on E-mode coupling. It uses a standard W-band waveguide and a microstrip line made on alumina substrate. It has been designed for the center frequency of 94 GHz. A back-to-back transition has been done and measured...

Microwave and Optical Technology Letters, 2005, 47, pp.518-520. ⟨hal-00154905⟩

• Article dans une revue

Terahertz generation by plasma waves in nanometer gate high electron mobility transistors

J. Lusakowski, F. Teppe, N. Dyakonova, Y.M. Meziani, W. Knap, T. Parenty, S. Bollaert, A. Cappy, V. Popov, M.S. Shur

Physica Status Solidi A (applications and materials science), 2005, 202, pp.656-659. ⟨hal-00154893⟩

• Communication dans un congrès

Analyse biologique THz par Bio MicroFluidic System (BioMFS)

Bertrand Bocquet, Vianney Mille, Nour Eddine Bourzgui

Actes des 3èmes Journées Térahertz, 2005, Aussois, France. ⟨hal-00247707⟩

• Article dans une revue

Study of structural and optical properties of InSb-doped SiO₂ thin films

B. Capoen, V.Q. Lam, S. Turrell, Jean-Pierre Vilcot, F. Beclin, Y. Jestin, M. Bouazaoui

The non-linear absorption and the structure of rf-cosputtered SiO2:InSb films were investigated after different heat-treatments at temperatures ranging from 200 to 900 °C. The heat-treatment was 1 min or 4 h in an atmosphere of nitrogen or under vacuum, respectively. After annealing at a...

• Article dans une revue

Gel to glass transformation of methyltriethoxysilane : a silicon oxycarbide glass precursor investigated using vibrational spectroscopy

A. Desmartin-Chomel, P. Dempsey, J. Latournerie, D. Bahloul-Hourlier, U. Jayasooriya

Chemistry of Materials, 2005, 17, pp.4468-4473. ⟨10.1021/cm050501p⟩. ⟨hal-00247491⟩