Publicaciones

• Article dans une revue

Mechanical analysis of interconnect structures using process simulation

V. Senez, T. Hoffmann, P. Le Duc, F. Murray

Journal of Applied Physics, 2003, 93, pp.6039-6049. ⟨hal-00146398⟩

• Communication dans un congrès

Thermally actuated probe arrays for manipulation and characterization of individual bio-cell

Beomjoon Kim, Dominique Collard, Matthieu Lagouge, F. Conseil, Bernard Legrand, Lionel Buchaillot

We introduce a new concept of thermal micro-actuators combined with electrical sensor device to capture and characterize individual living bio-cell. In our micro fabricated device, cantilevers integrated with sensing part (surface micro-machined poly-silicon) and actuation using the difference of...

TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Jun 2003, Boston, MA, United States. pp.1255-1258, ⟨10.1109/SENSOR.2003.1217000⟩. ⟨hal-00146460⟩

• Communication dans un congrès

Study and realisation of a micromechanical relay for use in harsh environment

F. Conseil, P. Derderian, M.F. Ravat, D. Collard, L. Buchaillot

2003, pp.108-112. ⟨hal-00146461⟩

• Communication dans un congrès

Reliable micromechanical relay for use in rough environment

F. Conseil, P. Derdeiran, M.F. Ravat, D. Collard, L. Buchaillot

2003, pp.243-247. ⟨hal-00146459⟩

• Communication dans un congrès

Feedback of MEMS reliability study on the design stage : a step toward reliability aided design (RAD)

L. Buchaillot

14th European Symposium on Reliability of Electron Devices, Failure Physics and Analysis, ESREF 2003, 2003, Arcachon, France. ⟨hal-00146457⟩

• Communication dans un congrès

Résonateurs de Perot-Fabry accordables en fréquence par cristal liquide

Ronan Sauleau, Nicolas Tentillier, Bertrand Splingart, Coquet Philippe

Treizièmes Journées Nationales Micro-ondes (JNM 2003), May 2003, Lille, France. 4 p. ⟨hal-00553231⟩

• Article dans une revue

Near-Field Coupling Between a Printed Antenna and a Fabry-Perot Resonator : Experimental Study of the Radiation Properties at Millimeter Wave Frequencies

Ronan Sauleau, Philippe Coquet, T. Matsui

Microwave and Optical Technology Letters, 2003, 38 (6), pp.438-443. ⟨hal-00553217⟩

• Communication dans un congrès

Numerical analysis of the process induced stresses in silicon microstructures

V. Senez, T. Hoffmann, A. Armigliato, I. de Wolf

2003, pp.350-361. ⟨hal-00146444⟩

• Article dans une revue

About the measurements of the d33 piezoelectric coefficient of the PZT film-Si/SiO2/Ti/Pt substrates using an optical cryostat

J. Nosek, L. Burianova, M. Sulc, Caroline Soyer, Eric Cattan, Denis Remiens

Ferroelectrics, 2003, 292, pp.103-109. ⟨hal-00146464⟩

• Communication dans un congrès

Sommation optique de signaux hyperfréquences

N. Breuil, C. Fourdin, P. Nicole, G. Ulliac, Jean-Pierre Vilcot, J. Chazelas

2003, pp.6C-6. ⟨hal-00146559⟩