Publicaciones

• Article dans une revue

Accurate modelling of large angle tilt (LATID) and pure vertical implantations : application to the simulation of n- and p-LDMOS backgates

Evelyne Lampin, Emmanuel Dubois, H. Xu, S. Bardy, F. Murray

The lateral and vertical extensions of the backgate of complementary laterally diffused metal oxide semiconductor (LDMOS) are simulated. The importance of channeling for a large-angle tilt implantation and a purely vertical (0°) implantation are studied with the atomistic simulator Crystal-TRIM....

IEEE Transactions on Electron Devices, 2003, 50 (5), pp.1401-1404. ⟨10.1109/TED.2003.813464⟩. ⟨hal-00146392⟩

• Article dans une revue

Strain determination in silicon microstructures by combined TEM/CBED, process simulation and micro-Raman spectroscopy

V. Senez, A. Armigliato, I. de Wolf, G. Carnevale, R. Balboni, S. Frabboni, A. Benedetti

Test structures consisting of shallow trench isolation (STI) structures are fabricated using advanced silicon (Si) technology. Different process parameters and geometrical features are implemented to investigate the residual mechanical stress in the structures. A technology computer aided design...

Journal of Applied Physics, 2003, 94 (9), pp.5574-5583. ⟨10.1063/1.1611287⟩. ⟨hal-00146408⟩

• Communication dans un congrès

Giant oscillations in the picosecond ultrasonics response of crystalline silicon : connection with electronic structure

Arnaud Devos, R. Cote, A. Le Louarn

2003, pp.1197-1200. ⟨hal-00144890⟩

• Communication dans un congrès

Commutateurs optiques de type DOS sur InP à haute diaphotie et faible consommation

Malek Zegaoui, Joseph Harari, V. Magnin, Didier Decoster

Actes de TELECOM 03 et 3èmes Journées Franco-Maghrébines des Microondes et leurs Applications, JFMMA 2003, 2003, Marrakech, Maroc. ⟨hal-00146533⟩

• Communication dans un congrès

Analyse temporelle d'interconnexions VLSI submicroniques en présence de charges non linéaires

Freddy Ponchel, Erick Paleczny, Jean-François Legier, Christophe Seguinot

Actes de TELECOM 03 et 3èmes Journées Franco-Maghrébines des Microondes et leurs Applications, JFMMA 2003, 2003, Marrakech, Maroc. ⟨hal-00146538⟩

• Communication dans un congrès

Characterization and numerical modeling of high frequency transducer arrays

B. Cugnet, Anne-Christine Hladky, Jamal Assaad

2003 US Navy Workshop on Acoustic Transduction Materials and Devices, 2003, State College, PA, United States. ⟨hal-00147115⟩

• Article dans une revue

Wave-mechanical calculations of leakage current through stacked dielectrics for nanotransistor Metal-Oxide-Semiconductor design

M. Le Roy, Eric Lheurette, O. Vanbésien, D. Lippens

Journal of Applied Physics, 2003, 93, pp.2966-2971. ⟨hal-00146086⟩

• Article dans une revue

Formation of Pt-based silicide contacts : kinetics, stochiometry and current drive capabilities

Guilhem Larrieu, Emmanuel Dubois, X. Wallart, Xavier Baie, J. Katcki

A detailed analysis of the formation of Pt2Si and PtSi silicides is proposed, based on x-ray photoelectron spectroscopy ~XPS!, transmission electron microscopy ~TEM!, and electrical characterizations. Published kinetics of the Pt2Si and PtSi transformations under ultrahigh vacuum condition are...

Journal of Applied Physics, 2003, 94 (12), pp.7801-7810. ⟨10.1063/1.1605817⟩. ⟨hal-00146394⟩

• Communication dans un congrès

Focalisation à l'aide de cavités de Perot-Fabry aux fréquences millimétriques

Ronan Sauleau, Philippe Coquet

Treizièmes Journées Nationales Micro-ondes, May 2003, Lille, France. 4 p. ⟨hal-00553233⟩

• Communication dans un congrès

Arabic isolated word recognition using general regression neural network

A. Amrouche, Jean-Michel Rouvaen

2003, pp.689-692. ⟨hal-00154885⟩