Publicaciones

• Communication dans un congrès

New Schottky source/drain architectures

Emmanuel Dubois

Workshop Micro et Nanoélectronique, 2003, Crolles, France. ⟨hal-00146417⟩

• Article dans une revue

Feedback of MEMS reliability study on the design stage : a step toward reliability aided design (RAD)

L. Buchaillot

Microelectronics Reliability, 2003, 43, pp.1919-1928. ⟨hal-00146437⟩

• Communication dans un congrès

2½ D microfabricated nib-like sources for nanoelectrospray applications

S. Le Gac, S. Arscott, C. Rolando

2003, pp.1211-1214. ⟨hal-00146442⟩

• Article dans une revue

Accurate modelling of large angle tilt (LATID) and pure vertical implantations : application to the simulation of n- and p-LDMOS backgates

Evelyne Lampin, Emmanuel Dubois, H. Xu, S. Bardy, F. Murray

The lateral and vertical extensions of the backgate of complementary laterally diffused metal oxide semiconductor (LDMOS) are simulated. The importance of channeling for a large-angle tilt implantation and a purely vertical (0°) implantation are studied with the atomistic simulator Crystal-TRIM....

IEEE Transactions on Electron Devices, 2003, 50 (5), pp.1401-1404. ⟨10.1109/TED.2003.813464⟩. ⟨hal-00146392⟩

• Article dans une revue

Strain determination in silicon microstructures by combined TEM/CBED, process simulation and micro-Raman spectroscopy

V. Senez, A. Armigliato, I. de Wolf, G. Carnevale, R. Balboni, S. Frabboni, A. Benedetti

Test structures consisting of shallow trench isolation (STI) structures are fabricated using advanced silicon (Si) technology. Different process parameters and geometrical features are implemented to investigate the residual mechanical stress in the structures. A technology computer aided design...

Journal of Applied Physics, 2003, 94 (9), pp.5574-5583. ⟨10.1063/1.1611287⟩. ⟨hal-00146408⟩

• Communication dans un congrès

Raman characterization of Mg+ ion-implanted GaN

B. Boudart, Yannick Guhel, J. C. Pesant, Paul Dhamelincourt, M.A. Poisson

7th International Workshop on Beam Injection Assessment of Microstructures in Semiconductors, 2003, Lille, France. ⟨hal-01649531⟩

• Communication dans un congrès

Finite volume methods for wave phase conjugation in active media

A. Merlen, P. Voinovitch, Vladimir Preobrazhensky, Philippe Pernod

6th International Conference on Mathematical and Numerical Aspects of Wave Propagation, WAVES 2003, 2003, Finland. pp.765-769. ⟨hal-00250177⟩

• Autre publication scientifique

Imagerie et détection ultrasonores par corrélation

B. El Khaldi

2003. ⟨hal-00162743⟩

• Communication dans un congrès

Nouvel applicateur planaire pour thermothérapie microonde

Julien Carlier, V. Thomy, J.C. Camart, Luc Dubois, J. Pribetich

13èmes Journées Nationales Microondes, JNM 2003, 2003, Lille, France. pp.122-124. ⟨hal-00146067⟩

• Article dans une revue

Deposition of ferroelectric BST thin films by sol gel route in view of electronic applications

G. Velu, Jean-Claude Carru, Eric Cattan, Denis Remiens, X. Melique, D. Lippens

We report on the deposition of Ba 0.7 Sr 0.3 TiO 3 thin films, BST (70/30), by a sol-gel process. After deposition by spin coating, the film is annealed at 750°C, one hour in air. BST films have been deposited on (111) silicon substrates (bare and platinum coated) and on (0001) sapphire. X-Ray...

Ferroelectrics, 2003, 288 (1), pp.59-69. ⟨10.1080/00150190390212007⟩. ⟨hal-00146068⟩