Publicaciones

• Chapitre d'ouvrage

Numerical modeling of sonic and ultrasonic devices

Bertrand Dubus

RANZ-GUERRA C., GALLEGO-JUAREZ J.A. New acoustics - Selected topics, Ed. Consejo Superior de Investigaciones Científicas (CSIC), Madrid, Spain, pp.37-74, 2002. ⟨hal-00132554⟩

• Article dans une revue

Characterisation of micromachining processes during KrF excimer laser ablation of TiNi shape memory alloy thin sheets and films

S.T. Davies, E.C. Havey, H. Jin, J.P. Hayes, M.K. Ghantasala, I. Roch, L. Buchaillot

Smart Materials and Structures, 2002, 11, pp.708-714. ⟨hal-00148762⟩

• Article dans une revue

A modified bosch-type process for precise surface micromachining of polysilicon

E. Quevy, B. Parvais, J.P. Raskin, L. Buchaillot, D. Flandre, D. Collard

Journal of Micromechanics and Microengineering, 2002, 12, pp.328-333. ⟨hal-00148763⟩

• Article dans une revue

Surface micro-machining : an overview

D. Collard, H. Fujita, H. Toshiyoshi, Bernard Legrand, L. Buchaillot

Nano et micro technologies, 2002, 2, pp.35-50. ⟨hal-00148781⟩

• Communication dans un congrès

Génération et détection d'impulsions électriques picosecondes à l'aide de patchs de GaAs et d'AlGaAs

L. Desplanque, Jean-Francois Lampin, F. Mollot

9èmes Journées Nationales Microélectronique et Optoélectronique, JNMO 2002, 2002, Saint-Aygulf, France. ⟨hal-00148673⟩

• Autre publication scientifique

Transport électronique dans l'ADN

T. Heim

2002. ⟨hal-00148694⟩

• Communication dans un congrès

Large signal behaviour of gallium nitride based HEMT's devices

Christophe Gaquière, Raphaël Aubry, Yannick Guhel, A. Minko, Nicolas Vellas, Matthieu Werquin, B. Boudart, Simone Cassette, Yvon Cordier, Sylvain Laurent Delage, E. Delos, Jean-Claude de Jaeger, Damien Ducatteau, H. Gerard

25th Workshop on Compound Semiconductor Devices and Integrated Circuits held in Europe, WOCSDICE 2002, 2002, Chermogolovska, Russia. ⟨hal-00149730⟩

• Communication dans un congrès

Influence of the hole injection layer in thienylene phenylene light emitting diodes

K. Lmimouni, M. Berliocchi, C. Dufour, D. Vuillaume, F. Tran Van, J. Grazulevicius, C. Chevrot, J.P. Lere-Porte, S. Wakim

INF Meeting, 2002, Bari, Italy. ⟨hal-00148713⟩

• Article dans une revue

Influence of the microstructure and of an ION beam etching on the domain propagation in PZT thin films

Brice Gautier, Caroline Soyer, Eric Cattan, Denis Remiens, Jean-Claude Labrune

PbZrTiO 3 (PZT) thin films have been grown by RF-magnetron sputtering and sputter etched by Argon ion beam. The topography of the bombarded material is studied by Atomic Force Microscope (AFM), several ferroelectric domains are created by applying a sufficiently high voltage between the tip of the...

Integrated Ferroelectrics, 2002, 50 (1), pp.231-240. ⟨10.1080/10584580215530⟩. ⟨hal-00149627⟩

• Article dans une revue

Reactive ion beam etching effects on maskless PZT properties

Caroline Soyer, Eric Cattan, Denis Remiens

Ion beam etching of sputtered Pb(Zr 0.54 ,Ti 0.46 )O 3 has been performed using pure Ar gas. The etch rate and selectivity ratios between PZT and masks as a function of the process parameters (current density, acceleration voltage, gas pressure) has been investigated. We have evaluated the PZT...

Integrated Ferroelectrics, 2002, 48, pp.221-229. ⟨10.1080/10584580215465⟩. ⟨hal-00149624⟩