Publicaciones

• Article dans une revue

Measurement of the elastic and viscoelastic properties of dielectric films used in microelectronics

G. Carlotti, P. Colpani, D. Piccolo, S. Santucci, V. Senez, G. Socino, L. Verdini

Thin Solid Films, 2002, 414, pp.99-104. ⟨hal-00148744⟩

• Communication dans un congrès

Monte Carlo study of the breakdown of an AlInAs/GaInAs HEMT on InP with an InP etch stop layer

F Medjdoub, D. Theron, F. Dessenne, R. Fauquembergue, Jean-Claude de Jaeger

2002, pp.57-62. ⟨hal-00149710⟩

• Communication dans un congrès

AlInAs/GaInAs HEMTs for power amplification at 60 GHz

M. Zaknoune, X. Wallart, F Medjdoub, M. Ardouin, B. Bonte, D. Theron, Jean-Claude de Jaeger

Workshop on Compound Semiconductor Materials and Devices, WOCSEMMAD 2002, 2002, Austin, TX, United States. ⟨hal-00149711⟩

• Article dans une revue

Multiple parallel conduction paths observed in depth-profiled n-GaN epilayers

C. Mavroidis, J. Harris, R. Jackman, I. Harrison, B. Ansell, Z. Bougrioua, I. Moerman

We have combined plasma etching with the Hall effect and resistivity measurements between 10 and 300 K to study the depth distribution of conduction in silicon (Si)-doped GaN epitaxial layers grown on sapphire substrates by two different metalorganic chemical vapor deposition processes. Reduction...

Journal of Applied Physics, 2002, 91 (12), pp.9835. ⟨10.1063/1.1477604⟩. ⟨hal-02906594⟩

• Autre publication scientifique

Stabilité des interactions silicium-hydrogène sous irradiation optique ou électronique dans les semiconducteurs à base de GaAs. Application à la fiabilité et à la nanofabrication de composants III-V

S. Silvestre

2002. ⟨hal-00162706⟩

• Communication dans un congrès

Piezoelectric properties of sputtered PZT films: influence of structure, microstructure, film thickness, (Zr,Ti) ratio and Nb substitution

Denis Remiens, Eric Cattan, Caroline Soyer, T. Haccart

European Materials Research Society Spring Meeting, Symposium P, Advanced Materials for Microelectronics : Ferroelectrics and Low-k Dielectrics, 2002, France. pp.123-127. ⟨hal-00250393⟩

• Autre publication scientifique

Du modèle de canal de propagation à l'optimisation des systèmes de télécommunications

M. Lienard

2002. ⟨hal-00577049⟩

• Article dans une revue

Reliability of polysilicon microstructures : in situ test benches

O. Millet, D. Collard, L. Buchaillot

Microelectronics Reliability, 2002, 42, pp.1795-1800. ⟨hal-00148766⟩

• Communication dans un congrès

High-frequency high-Q micro-mechanical resonators in thick epipoly technology with post-process gap adjustment

D. Galayko, A. Kaiser, Bernard Legrand, C. Combi, D. Collard, L. Buchaillot

2002, pp.665-668. ⟨hal-00148737⟩

• Article dans une revue

Microsystem for telecommunication

D. Collard, L. Buchaillot

Seisan Kenkyu, 2002, 54, pp.135-139. ⟨hal-00148767⟩