Publicaciones

Affichage de 4991 à 5000 sur 16064


  • Article dans une revue

Gallium nitride MEMS resonators: how residual stress impacts design and performances

Christophe Morelle, Didier Theron, Joff Derluyn, Stefan Degroote, Marianne Germain, Victor Zhang, Lionel Buchaillot, Bertrand Grimbert, Pascal Tilmant, Francois Vaurette, Isabelle Roch-Jeune, Virginie Brandli, Vanessa Avramovic, Etienne Okada, Marc Faucher

Starting from Gallium Nitride epitaxially grown on silicon, pre-stressed micro-resonators with integrated piezoelectric transducers have been designed, fabricated, and characterized. In clamped-clamped beams, it is well known that tensile stress can be used to increase the resonant frequency. Here...

Microsystem Technologies, 2018, 24 (1), pp.371-377. ⟨10.1007/s00542-017-3293-0⟩. ⟨hal-03183510⟩

  • Ouvrages

Phononics

Leonard Dobrzynski

Elsevier, 2018, ⟨10.1016/C2015-0-06475-9⟩. ⟨hal-04085470⟩

  • Article dans une revue

One-step immersion for fabrication of superhydrophobic/superoleophilic carbon felts with fire resistance: Fast separation and removal of oil from water

Yuanyuan Cheng, Ge He, Alexandre Barras, Yannick Coffinier, Shixiang Lu, Wenguo Xu, Sabine Szunerits, Rabah Boukherroub

Chemical Engineering Journal, 2018, 331, pp.372-382. ⟨10.1016/j.cej.2017.08.088⟩. ⟨hal-02351532⟩