Publicaciones

Affichage de 5941 à 5950 sur 16385


  • Communication dans un congrès

Advantages of ALD over evaporation deposition for high-K materials integration in high power capacitive RF MEMS

Guillaume Croizier, Paolo Martins, M. Le Bailiff, Raphaël Aubry, S. Bansropun, M. Fryziel, Nathalie Rolland, Afshin Ziaei

We report a study over a wide range of high-K dielectric materials (AlxOy, HfOx, TiOx.) deposited by different techniques (Evaporation, ALD, PEALD ... ) for high power RF applications. Main results show that ALD technique is matching the McPherson trend based on thermochemical prediction....

19th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers), Jun 2017, Kaohsiung, Taiwan. pp.1237-1240, ⟨10.1109/TRANSDUCERS.2017.7994279⟩. ⟨hal-03270114⟩

  • Article dans une revue

Interview: Joseph Agassi

Mauro Condé, Raffaele Pisano, Michael Segre

Joseph Agassi is an Israeli scholar born in Jerusalem on May 7, 1927. He has many books and articles published contributing to the fields of logic, scientific method, foundations of sciences, epistemology and, most importantly for this Journal, in the historiography of science. He studied with Karl...

Transversal: International Journal for the Historiography of Science, 2016, 1 (1), pp.116-119. ⟨10.24117/2526-2270.2016.i1.13⟩. ⟨hal-04509353⟩

  • Article dans une revue

Running Details on the Two Movements in the Intellectual History of Science and Ideas [Editorial]

Raffaele Pisano

Journal of Baltic Science Education, 2016, 15 (6), pp.660-661. ⟨10.33225/jbse/16.15.660⟩. ⟨hal-04509342⟩