Publicaciones

• Article dans une revue

Optimization of ohmic contact and adhesion on polysilicon in MEMS–NEMS wet etching process

Etienne Herth, Emmanuelle Algré, Bernard Legrand, Lionel Buchaillot

This paper presents the optimization of polysilicon doping and metallization to form ohmic contact with etching resistance. Indeed, polysilicon doped by ion implantation and ohmic contacts are an important and interesting part of integrated circuit technology or MEMS and NEMS. LPCVD-polysilicon...

Microelectronic Engineering, 2011, 88 (5), pp.724-728. ⟨10.1016/j.mee.2010.06.032⟩. ⟨hal-02300269⟩

• Communication dans un congrès

Étude par ultrasons-laser de l'influence d'un défaut débouchant sur la propagation des ondes acoustiques

Frédéric Faëse, Frédéric Jenot, Mohammadi Ouaftouh, Marc Duquennoy

XIIèmes Journées d'Acoustique Physique Sous-Marine et Ultrasonore, JAPSUS 2011, 2011, Lille, France. ⟨hal-00807691⟩

• Communication dans un congrès

Accurate multibias equivalent-circuit extraction for AlGaN/GaN/Si HEMTs passivated SiO2/Si3N4

H. Mosbahi, M. Gassoumi, M.A. Zaidi, Christophe Gaquière, B. Grimbert, H. Maaref

European Materials Research Society Fall Meeting, E-MRS Fall 2011, Symposium H : Novel materials for electronics, optoelectronics, photovoltaics and energy saving applications, 2011, Warsaw, Poland. ⟨hal-00807603⟩

• Communication dans un congrès

Droplet based lab-on-chip microfluidic microsystems for high sensitive mass spectrometry analysis

F. Lapierre, G. Piret, G. Perry, V. Thomy, Yannick Coffinier, Rabah Boukherroub

5th International Workshop on Surface Modification for Chemical and Biochemical Sensing, SMCBS'2011, 2011, Lochow, Poland. ⟨hal-00807637⟩

• Communication dans un congrès

Formation and evolution of exotic polarization textures in nanoferroelectrics

Laurent Baudry, Igor A. Luk'Yanchuk, Anaïs Sené

International Symposium on Integrated Functionalities, ISIF 2011, 2011, Cambridge, England, United Kingdom. ⟨hal-00807624⟩

• Communication dans un congrès

Ultrasonic tomography of liquids flows by means of phase-conjugated acoustical waves

Y.V. Pylnov, Philippe Pernod, V.L. Preobrazhensky

International Conference "Functional Materials", ICFM 2011, 2011, Partenit, Crimea, Ukraine. ⟨hal-00807182⟩

• Communication dans un congrès

Molecular electronics

D. Vuillaume

2nd NANO-TEC Workshop, Benchmarking of new beyond CMOS device/design concepts, 2011, Athens, Greece. ⟨hal-00807192⟩

• Article dans une revue

Giant magnetostrictive nanostructured films with auto induced spin reorientation transition

Yannick Dusch, Nicolas Tiercelin, A. Klimov, V. Rudenko, Y. Ignatov, S. Hage-Ali, Philippe Pernod, Vladimir Preobrazhensky

In various micro and nanosystems applications comprising magnetic films, the polarizing field still needs to be integrated. We hereby present a solution for self biasing of magnetic films using micropatterned permanent magnets. Micromagnetic simulations were used as a designing and optimization...

Nanomaterialy i nanostruktury XXI vek., 2011, 1, pp.35-41. ⟨hal-00783384⟩

• Ouvrages

Electromagnetic Reverberation Chambers

Philippe Besnier, Bernard Démoulin

Dedicated to a complete presentation on all aspects of reverberation chambers, this book provides the physical principles behind these test systems in a very progressive manner. The detailed panorama of parameters governing the operation of electromagnetic reverberation chambers details various...

ISTE/Wiley, pp.400, 2011, P.N.Favennec. ⟨hal-00640424⟩

• Communication dans un congrès

Characterization of amorphous tantalum oxide for insulating acoustic mirrors

J. Capilla, J. Olivares, M. Clement, J. Sangrador, E. Iborra, Arnaud Devos

Joint Conference of the IEEE International Frequency Control Symposium and the European Frequency and Time Forum, IFCS/EFTF 2011, 2011, San Francisco, CA, United States. pp.1-6, ⟨10.1109/FCS.2011.5977833⟩. ⟨hal-00800087⟩