Publicaciones

• Article dans une revue

Optimization of ohmic contact and adhesion on polysilicon in MEMS–NEMS wet etching process

Etienne Herth, Emmanuelle Algré, Bernard Legrand, Lionel Buchaillot

This paper presents the optimization of polysilicon doping and metallization to form ohmic contact with etching resistance. Indeed, polysilicon doped by ion implantation and ohmic contacts are an important and interesting part of integrated circuit technology or MEMS and NEMS. LPCVD-polysilicon...

Microelectronic Engineering, 2011, 88 (5), pp.724-728. ⟨10.1016/j.mee.2010.06.032⟩. ⟨hal-02300269⟩

• Article dans une revue

Materials chemistry for catalysis : coating of catalytic oxides on metallic foams

A. Essakhi, A. Löfberg, S. Paul, B. Mutel, P. Supiot, V. Le Courtois, P. Rodriguez, V. Meille, E. Bordes-Richard

Catalytic structured reactors are designed to improve both heat and mass transfers during reactions in the presence of catalytic layers. The know-how acquired in the coating of stainless steel walls by catalytic layers of VOx/TiO2, active in the abatement of volatile organic compounds and in the...

Microporous and Mesoporous Materials, 2011, 140, pp.81-88. ⟨10.1016/j.micromeso.2010.10.018⟩. ⟨hal-00572663⟩

• Article dans une revue

Exploit the bandwidth capacities of the perfluorinated graded index polymer optical fiber for multi-services distribution

C. Lethien, Christophe Loyez, Jean-Pierre Vilcot, N. Rolland, P.A. Rolland

The study reported here deals with the exploitation of perfluorinated graded index polymer optical fiber bandwidth to add further services in a home/office network. The fiber properties are exhibited in order to check if perfluorinated graded index plastic optical fiber (PFGI-POF) is suitable to...

Polymers, 2011, 3 (3), pp.1006-1028. ⟨10.3390/polym3031006⟩. ⟨hal-00639804⟩

• Communication dans un congrès

Nanofils et énergie : un domaine en forte expansion

Pere Roca I Cabarrocas, C. Lethien, Thierry Brousse, N. Guillet, A. Gruss, Agnès Bonvilain, G. Savelli, J. Stockholm, Luc Brohan, S. Perraud, T. Pauporte

Séminaire Annuel de l'Observatoire des Micro et Nanotechnologies, 2011, Paris, France. ⟨hal-00574515⟩

• Article dans une revue

Golden ratio-based and tapered diptera inspired wings : their design and fabrication using standard MEMS technology

X.Q. Bao, Eric Cattan

Journal of Bionic Engineering, 2011, 8, pp.174-180. ⟨10.1016/S1672-6529(11)60023-1⟩. ⟨hal-00603032⟩

• Article dans une revue

Opposition control with arrayed actuators in the near-wall region of a spatially-developing turbulent boundary layer

M. Pamies, E. Garnier, A. Merlen, P. Sagaut

International Journal of Heat and Fluid Flow, 2011, 32, pp.621-630. ⟨10.1016/j.ijheatfluidflow.2011.03.005⟩. ⟨hal-00597083⟩

• Communication dans un congrès

Charge generation efficiency of core-shell Si nanowires

T. Xu, J.P. Nys, Maxime Berthe, B. Grandidier, D. Stievenard, G. Patriarche, W. Chen, R. Larde, E. Cadel, P. Pareige, D.H.K. Murthy, T.J. Savenije

2èmes Journées Nanosciences et Nanotechnologies du C'nano Nord-Ouest, J2NO 2011, 2011, Rouen, France. ⟨hal-00807231⟩

• Communication dans un congrès

Theoretical investigation of thermal resistance at the Si/SiO2 interface

E. Lampin, F. Cleri, Q.H. Nguyen, P.A. Francioso

Materials Research Society Fall Meeting, MRS Fall 2011, Symposium W : Phonons in nanomaterials - Theory, experiments, and applications, 2011, Boston, MA, United States. ⟨hal-00807263⟩

• Communication dans un congrès

Investigation of dopants in silicon nanowires grown by solid-liquid-solid or vapor-liquid-solid

W. Chen, R. Lardé, E. Cadel, B. Grandidier, D. Stievenard, L.W. Yu, Pere Roca I Cabarrocas, G. Patriarche, S. Bouchoule, P. Pareige

2èmes Journées Nanosciences et Nanotechnologies du C'nano Nord-Ouest, J2NO 2011, 2011, Rouen, France. ⟨hal-00807251⟩

• Communication dans un congrès

Mécanismes ioniques de reconnaissance moléculaire : un outil d'auto assemblage pour les nanotechnologies

F. Cleri

Journées Franco-Libanaises Physique et Interfaces, JFLPI, 2011, Villeneuve d'Ascq, France. ⟨hal-00807252⟩