Publications

• Article dans une revue

Modeling and experimental validation of sharpening mechanism based on thermal oxidation for fabrication of ultra-sharp silicon nanotips

Vincent Agache, Roger Ringot, Patrice Bigotte, Vincent Senez, Bernard Legrand, Lionel Buchaillot, Dominique Collard

This paper aims at modeling the thermal oxidation of silicon pillars leading to the formation of very sharp silicon tips. The model is used to determine optimum process parameters with respect to the initial shape of the silicon pillars and the geometry of the desired tip. The modeling concept is…

IEEE Transactions on Nanotechnology, 2005, 4, pp.548-556. ⟨10.1109/TNANO.2005.851386⟩. ⟨hal-00125632⟩

• Communication dans un congrès

The 2D feedback conveyance with ciliary actuator arrays

M. Ataka, Bernard Legrand, L. Buchaillot, D. Collard, H. Fujita

2005, pp.31-34. ⟨hal-00125659⟩

• Communication dans un congrès

Vers une imagerie par spectrométrie de masse clinique à haut débit

M. Wisztorski, R. Lemaire, O. Jardin-Mathe, C. Courcelle, V. Thomy, J.B. Hendra, P. Ducoroy, M. Salzet, I. Fournier

Journée Innovations en Protéomique, 1ères rencontres du MASTER Protéomique de Lille, 2005, Villeneuve d Ascq, France. ⟨hal-00126223⟩

• Communication dans un congrès

RF blade nano-electromechanical resonator with self-aligned process for definition of lateral electrostatic transducers

Vincent Agache, Bernard Legrand, Dominique Collard, Hiroyuki Fujita, Lionel Buchaillot

In this paper, the design, fabrication, and characterization of a new class of electromechanical resonator based on a blade geometry is proposed. This particular geometry allows self-alignment of the mechanical resonator to its lateral electrodes with nanometer scale lateral gap (<50 nm), while…

Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2005, 2005, Montreux, Switzerland. pp.26-31. ⟨hal-00128656⟩

• Communication dans un congrès

Simple plasmon multiplexer

L. Dobrzynski, Maxime Beaugeois, Abdellatif Akjouj, Bahram Djafari-Rouhani, Jerome O. Vasseur, Yan Pennec, Mohamed Bouazaoui, Jean-Pierre Vilcot, Sophie Maricot, J.P. Vigneron

International Symposium on Photons and Phonons in Solids, 2005, Puebla, Mexico. ⟨hal-00130839⟩

• Communication dans un congrès

Analyse biologique THz par Bio MicroFluidic System (BioMFS)

Bertrand Bocquet, Vianney Mille, Nour Eddine Bourzgui

Actes des 3èmes Journées Térahertz, 2005, Aussois, France. ⟨hal-00247707⟩

• Article dans une revue

Terahertz generation by plasma waves in nanometer gate high electron mobility transistors

J. Lusakowski, F. Teppe, N. Dyakonova, Y.M. Meziani, W. Knap, T. Parenty, S. Bollaert, A. Cappy, V. Popov, M.S. Shur

Physica Status Solidi A (applications and materials science), 2005, 202, pp.656-659. ⟨hal-00154893⟩

• Communication dans un congrès

On the analysis of four symmetrical interconnects for signal integrity evaluation

Freddy Ponchel, Jean-François Legier, Erick Paleczny, Christophe Seguinot, Denis Deschacht

2005, pp.145-147. ⟨hal-00162804⟩

• Article dans une revue

High In content pseudomorphic InGaAs layers for high mobility heterostructures on InP(001)

X. Wallart, B. Pinsard, F. Mollot

Journal of Crystal Growth, 2005, 278, pp.516-520. ⟨hal-00125354⟩

• Communication dans un congrès

High frequency noise of SOI MOSFETs : performances and limitations

Francois Danneville, G. Pailloncy, A. Siligaris, B. Iniguez, Gilles Dambrine

SPIE Fluctuations and Noise Conference, Noise in Devices and Circuits III, 2005, Austin, TX, United States. ⟨hal-00125318⟩