Publications

• Autre publication scientifique

Stabilité des interactions silicium-hydrogène sous irradiation optique ou électronique dans les semiconducteurs à base de GaAs. Application à la fiabilité et à la nanofabrication de composants III-V

S. Silvestre

2002. ⟨hal-00162706⟩

• Article dans une revue

Fabrication of a pMUT using silicon bulk micromachining and a sputtered PZT layer

W. Daniau, Karim Dogheche, S. Ballandras, Eric Cattan, Denis Remiens, W. Steichen, P. Blind

Proc. of the 2nd WorkShop on MUT, Besançon, 2002, pp. june. ⟨hal-00123195⟩

• Article dans une revue

Microwave technique for detection, location and sizing of buried objects

Latifa Achrait-Furlan, T. Lasri, Ahmed Mamouni

The detection, location, and sizing of immersed objects in a host medium are tasks of interest in many fields. One of the most suitable tools for the noninvasive measurements of buried objects is the use of microwaves. We propose in this paper a microwave method based on the knowledge of the…

Microwave and Optical Technology Letters, 2002, 32 (2), pp.145-149. ⟨10.1002/mop.10115⟩. ⟨hal-00147852⟩

• Communication dans un congrès

Emission basse fréquence par interaction non-linéaire d'ondes ultrasonores

Philippe Pernod, Y. Pylnov, Vladimir Preobrazhensky

Actes du 6ème Congrès Français d'Acoustique, CFA 2002, 2002, Lille, France. ⟨hal-00148704⟩

• Communication dans un congrès

Beam forming through the use of electromagnetic band gap materials

Tahsin Akalin, G. Wolf, S. Arscott, Xavier Mélique, Olivier Vanbésien, Eric Estebe, Didier Lippens

25th ESA Antenna Workshop, 2002, Noordwijk, Netherlands. ⟨hal-00148652⟩

• Article dans une revue

Design production and testing of PMN-PT electrostrictive transducers

J. Coutte, Bertrand Dubus, J.C. Debus, C. Granger, D. Jones

Ultrasonics, 2002, 40, pp.883-888. ⟨hal-00147756⟩

• Article dans une revue

Vacuum and cryogenic station for Micro-Electro-Mechanical Systems probing and testing

Bernard Legrand, E. Quévy, B. Stefanelli, D. Collard, L. Buchaillot

Review of Scientific Instruments, 2002, 73, pp.4393-4395. ⟨hal-00148782⟩

• Autre publication scientifique

Microcapteurs de rayonnement infrarouge en technologie silicium

Mohamed Boutchich

2002. ⟨hal-00148731⟩

• Article dans une revue

Characterization of phosphorus and boron heavily doped LPCVD polysilicon films in the temperature range 293-373K

Mohamed Boutchich, Katir Ziouche, Pascale Godts, Didier Leclercq

In this paper, thermal properties of phosphorus and boron-doped low pressure chemical vapor deposition (LPCVD) polysilicon layers with regard to sensor applications are presented. Thermoelectric coefficient and relative resistance variations of polysilicon are investigated within the temperature…

IEEE Electron Device Letters, 2002, 23 (3), pp.139-141. ⟨10.1109/55.988817⟩. ⟨hal-00148729⟩

• Article dans une revue

Measurement of the elastic and viscoelastic properties of dielectric films used in microelectronics

G. Carlotti, P. Colpani, D. Piccolo, S. Santucci, V. Senez, G. Socino, L. Verdini

Thin Solid Films, 2002, 414, pp.99-104. ⟨hal-00148744⟩