Publications

• Chapitre d'ouvrage

BAW-IC co-integration tunable filters at GHz frequencies

A. Cathelin, S. Razafimandimby, A. Kaiser

A.H.M. van Roermund, M. Steyaert, H. Casier. Analog circuit design : smart data converters, filters on chip, multimode transmitters, Springer-Verlag, pp.207-232, 2010. ⟨hal-00575846⟩

• Chapitre d'ouvrage

Microtechnologies and micromanipulation

L. Buchaillot

Chaillet N., Régnier S. Microrobotics for micromanipulation, Wiley-ISTE, pp.335-368, 2010. ⟨hal-00575862⟩

• Communication dans un congrès

MEMS-based multisensors platform with piezoelectric actuation and piezoresistive read-out capabilities for biosensing applications

Thomas Alava, Fabrice Mathieu, Denis Remiens, Caroline Soyer, Liviu Nicu

Biosensors 2010, 2010, Glasgow, United Kingdom. ⟨hal-00574487⟩

• Article dans une revue

Characterization of nano-crystalline diamond films grown under continuous DC bias during plasma enhanced chemical vapor deposition

V. Mortet, L. Zhang, M. Eckert, A. Soltani, J. d'Haen, O. Douhéret, M. Moreau, S. Osswald, E. Neyts, David Troadec, P. Wagner, A. Bogaerts, G. van Tendeloo, K. Haenen

Nanocrystalline diamond films have generated much interested due to their diamond-like properties and low surface roughness. Several techniques have been used to obtain a high re-nucleation rate, such as hydrogen poor or high methane concentration plasmas. In this work, the properties of nano-…

MRS Online Proceedings Library, 2010, 1203, pp.J05-03. ⟨10.1557/PROC-1203-J05-03⟩. ⟨hal-00656630⟩

• Chapitre d'ouvrage

MEMS acoustiques

Michel Bruneau, Anne-Christine Hladky

Livre blanc de l'acoustique en France en 2010, Société Française d'Acoustique, pp.80, 2010, ISBN 978-2-919340-00-2. ⟨hal-00800615⟩

• Communication dans un congrès

Laser ultrasonics and guided waves for the thickness estimation of thin layers

Fabien Lefèvre, Frédéric Jenot, Mohammadi Ouaftouh, Marc Duquennoy, Mohamed Ourak

The dispersion of guided waves has been probed to estimate the thickness of a thin gold layer deposited on a two inches silicon wafer. Ultrasonic waves were generated and detected in a non-destructive and non-contact way using a laser ultrasonic setup. The guided waves dispersion curves were…

10ème Congrès Français d'Acoustique, Apr 2010, Lyon, France. ⟨hal-00538344⟩

• Communication dans un congrès

ZnO contour-mode resonator

Tadeusz Gryba, Julien Carlier, Shengxiang Wang, Xingzhong Zhao, Shishang Guo, Jean-Etienne Lefebvre

This paper reports on design, fabrication and experimental testing of one port ZnO piezoelectric contour- mode MEMS resonator. This is a rectangular plate formed by ZnO layer between two electrodes platinum and aluminium. A vertical electric field is applied to a layer of ZnO and induces in plane…

10ème Congrès Français d'Acoustique, Apr 2010, Lyon, France. ⟨hal-00541390⟩

• Article dans une revue

Subterahertz characterization of ethanol hydration layers by microfluidic system

Simon Laurette, A. Treizebre, Frederic Affouard, Bertrand Bocquet

Characterizations of ethanol hydration layers are examined through subterahertz spectroscopy of water/ethanol mixtures by using a microfluidic system. A three-component model is used to explain measurements discrepancies with the Lambert–Beer law and to determine ethanol hydration shell absorption…

Applied Physics Letters, 2010, 97, pp.111904-1-3. ⟨10.1063/1.3488832⟩. ⟨hal-00549500⟩

• Article dans une revue

On Principles In Sadi Carnot’s Thermodynamics (1824). Epistemological Reflections

Raffaele Pisano

Almagest, 2010, 1 (2), pp.128-179. ⟨10.1484/J.ALMA.3.16⟩. ⟨hal-04507955⟩

• Communication dans un congrès

Atomic scale dopant metrology in an individual silicon nanowire by atom probe tomography

W.H. Chen, Rodrigue Lardé, Emmanuel Cadel, T. Xu, J.P. Nys, B. Grandidier, D. Stiévenard, Philippe Pareige

In this work, the p-type silicon nanowires (SiNWs) are grown by the Chemical Vapor Deposition (CVD) method using gold as catalyst droplet, silane as precursor and diborane as dopant reactant and are analyzed at the atomic scale using the three dimensional laser assisted Atom Probe Tomography (APT…

Nanotechnology 2010 Advanced Materials, CNTs, Particles, Films and Composites - 2010 NSTI Nanotechnology Conference and Expo, NSTI-Nanotech 2010, Jun 2010, Anaheim, CA, United States. pp.29-32. ⟨hal-01953261⟩