Publications

Affichage de 6851 à 6860 sur 16549


  • Article dans une revue

Wafer-scale fabrication of self-actuated piezoelectric nanoelectromechanical resonators based on lead zirconate titanate (PZT)

Denis Dezest, Olivier Thomas, Fabrice Mathieu, Laurent Mazenq, Caroline Soyer, Jean Costecalde, Denis Remiens, Jean-François Deü, Liviu Nicu

In this paper we report an unprecedented level of integration of self-actuated nanoelectromechanical system (NEMS) resonators based on a 150 nm thick lead zirconate titanate (PZT) thin film at the wafer-scale. A top-down approach combining ultraviolet (UV) lithography with other standard planar…

Journal of Micromechanics and Microengineering, 2015, 25 (3), pp.35002-35013. ⟨10.1088/0960-1317/25/3/035002⟩. ⟨hal-01169283⟩

  • Autre publication scientifique

Advances in Historical Studies [Editor in Chief 4/1]

Raffaele Pisano

2015. ⟨hal-04511040⟩

  • Article dans une revue

Editing Newton In Geneva And Rome : The Annotated Edition Of The Principia By Calandrini, Le Seur And Jacquier [Article Review]

Raffaele Pisano

Mathematical Reviews, 2015. ⟨hal-04509463⟩

  • Article dans une revue

The Geometrical Foundation of Federigo Enriques’ Gnoseology and Epistemology

Paolo Bussotti, Raffaele Pisano

Advances in Historical Studies, 2015, 04 (02), pp.118-145. ⟨10.4236/ahs.2015.42012⟩. ⟨hal-04507571⟩