Publications

• Communication dans un congrès

Wafer bonding process for III-V nanowires in BCB high index contrast waveguides

Michel Carette, D. Lauvernier, Jean-Pierre Vilcot, D. Bernard, Didier Decoster

WAPITI/PICMOS Workshop on III/V photonic components 3 dimensional integration, 2006, Halle, Germany. ⟨hal-00138907⟩

• Autre publication scientifique

Conception de microsystèmes à base d'actionneurs en SU8 pour la manipulation de micro-objets en milieu liquide et transfert vers un milieu quasi-sec

M. Lagouge

2006. ⟨hal-00138927⟩

• Autre publication scientifique

Conception, réalisation et caractérisation des microcanaux pour les applications microfluidiques

M. Gaudet

2006. ⟨hal-00138941⟩

• Autre publication scientifique

Technologies microsystèmes avancées pour le fonctionnement de dispositifs en milieu liquide et les applications nanométriques

A.S. Rollier

2006. ⟨hal-00138943⟩

• Article dans une revue

Fabrication and room-temperature single-charging behavior of self-aligned single-dot memory devices

Xing Tang, N. Reckinger, V. Bayot, Christophe Krzeminski, Emmanuel Dubois, A. Villaret, D.C. Bensahel

Self-aligned single-dot memory devices and arrays were fabricated based on arsenic-assisted etching and oxidation effects. The resulting device has a floating gate of about 5-10 nm, presenting single-electron memory operation at room temperature. In order to realize the final single-electron memory…

IEEE Transactions on Nanotechnology, 2006, 5 (6), pp.649-656. ⟨10.1109/TNANO.2006.883481⟩. ⟨hal-00138655⟩

• Article dans une revue

Transformation of hydrogen silsesquioxane properties with RIE plasma treatment for advanced multiple-gate MOSFETs

J. Penaud, F. Fruleux, Emmanuel Dubois

Keeping in line with Moore's law requires increasing efforts in the development of alternative electronic devices. Multiple-gate transistors are very promising in order to suppress short-channel effects and to increase the current drive. Nevertheless, the fabrication of such devices represents…

Applied Surface Science, 2006, 253 (1), pp.395-399. ⟨10.1016/j.apsusc.2006.06.021⟩. ⟨hal-00138654⟩

• Article dans une revue

An optimal high contrast e-beam lithography process for the patterning of dense fin networks

F. Fruleux, J. Penaud, Emmanuel Dubois, M. Francois, M. Muller

There are many difficulties to overcome towards the integration of 10 nm CMOS technology. One such major challenge is to keep a tight control of the leakage current of devices while increasing the current drive at a reduced supply voltage. In this context, multi-gated structures, which are used to…

Materials Science and Engineering: C, 2006, 26 (5-7), pp.893-897. ⟨10.1016/j.msec.2005.09.017⟩. ⟨hal-00138653⟩

• Communication dans un congrès

Microfluidic devices for ultra wide band electromagnetic spectroscopy of single cell

Tahsin Akalin, S. Arscott, Bertrand Bocquet, Nour Eddine Bourzgui, Vincent Senez, A. Treizebre, Teruo Fujii, Erwan Lennon, Yasuyuki Sakai, Takahisa Yamamoto

By performing dielectric spectroscopy across a wide spectrum of frequencies (DC-THz), single-cell analysis could be performed without labeling process. That is why we are developing different micro structures, either planar/3D electrodes or transmission lines, and microfluidic devices using BIOMEMS…

International Conference on Microtechnologies in Medicine and Biology, May 2006, Okinawa, Japan. pp.252-255, ⟨10.1109/MMB.2006.251542⟩. ⟨hal-00130878⟩

• Communication dans un congrès

Novel device concepts for microwave photonics functionalities

Jean-Pierre Vilcot, S. Garidel, G. Ulliac

2006, pp.63432-E1-E6. ⟨hal-00130865⟩

• Communication dans un congrès

Passive photonic components using InP optical wire technology for nano optics based optical switches and matrices

Marie Lesecq, Sophie Maricot, Jean-Pierre Vilcot

1st ISIS Workshop, 2006, Boppard am Rhein, Germany. ⟨hal-00130871⟩