Publications

• Communication dans un congrès

Etude et optimisation de commutateurs DOS à haute diaphotie sur InP

Malek Zegaoui, Joseph Harari, V. Magnin, Didier Decoster

22èmes Journées Nationales d'Optique Guidée, JNOG 2003, Nov 2003, Valence, France. ⟨hal-00146563⟩

• Article dans une revue

Strain determination in silicon microstructures by combined TEM/CBED, process simulation and micro-Raman spectroscopy

V. Senez, A. Armigliato, I. de Wolf, G. Carnevale, R. Balboni, S. Frabboni, A. Benedetti

Test structures consisting of shallow trench isolation (STI) structures are fabricated using advanced silicon (Si) technology. Different process parameters and geometrical features are implemented to investigate the residual mechanical stress in the structures. A technology computer aided design…

Journal of Applied Physics, 2003, 94 (9), pp.5574-5583. ⟨10.1063/1.1611287⟩. ⟨hal-00146408⟩

• Communication dans un congrès

Finite volume methods for wave phase conjugation in active media

A. Merlen, P. Voinovitch, Vladimir Preobrazhensky, Philippe Pernod

6th International Conference on Mathematical and Numerical Aspects of Wave Propagation, WAVES 2003, 2003, Finland. pp.765-769. ⟨hal-00250177⟩

• Article dans une revue

Wave-mechanical calculations of leakage current through stacked dielectrics for nanotransistor Metal-Oxide-Semiconductor design

M. Le Roy, Eric Lheurette, O. Vanbésien, D. Lippens

Journal of Applied Physics, 2003, 93, pp.2966-2971. ⟨hal-00146086⟩

• Communication dans un congrès

Microelectromechanical coupled resonsator IF filters with variable bandwidth in thick-film epitaxial polysilicon technology

D. Galayko, A. Kaiser, Bernard Legrand, L. Buchaillot, D. Collard, C. Combi

2003, pp.F23-F26. ⟨hal-00146406⟩

• Communication dans un congrès

Microfluidics for proteomics : discrete liquids

Julien Carlier, F. Caron, J.C. Fourrier, V. Thomy, C. Druon, P. Tabourier, J.C. Camart, S. Le Gac, C. Rolando, S. Arscott

Japan-European Workshop on Chem Micro Mechatronics Systems and Biochips, 2003, Cachan, France. ⟨hal-00146400⟩

• Communication dans un congrès

Raman characterization of Mg+ ion-implanted GaN

B. Boudart, Yannick Guhel, J. C. Pesant, Paul Dhamelincourt, M.A. Poisson

7th International Workshop on Beam Injection Assessment of Microstructures in Semiconductors, 2003, Lille, France. ⟨hal-01649531⟩

• Autre publication scientifique

Imagerie et détection ultrasonores par corrélation

B. El Khaldi

2003. ⟨hal-00162743⟩

• Communication dans un congrès

Giant magnetostriction nanostructures for actuation of microsystems

Philippe Pernod, Vladimir Preobrazhensky

2003, pp.7. ⟨hal-00146135⟩

• Communication dans un congrès

Focalisation à l'aide de cavités de Perot-Fabry aux fréquences millimétriques

Ronan Sauleau, Philippe Coquet

Treizièmes Journées Nationales Micro-ondes, May 2003, Lille, France. 4 p. ⟨hal-00553233⟩