Publications

• Communication dans un congrès

[Invited] MEMS research, applications and results

S. Arscott

Workshop on Nanoscale Processing for MEMS and NEMS, 2014, Villeneuve d'Ascq, France. ⟨hal-00976620⟩

• Communication dans un congrès

Pushing the limits of GaN-on-silicon device breakdown voltage for high power applications

Nicolas Herbecq, Isabelle Roch-Jeune, F Medjdoub

CMOS Emerging Technologies Research Symposium, 2014, Grenoble, France. ⟨hal-00976633⟩

• Article dans une revue

Measurement of the thermal conductivity of polydimethylsiloxane polymer using the three omega method

Nadine Al-Khudary, Pierre-Yves Cresson, Yovan Orlic, Philippe Coquet, Philippe Pernod, T. Lasri

Polydimethylsiloxane (PDMS) has widely appeared in different electronic and medical applications. The knowledge of the thermal properties of PDMS and especially its thermal conductivity is required while processing PDMS to design a particular device. In this paper measurement of the thermal…

Key Engineering Materials, 2014, 613, pp.259-266. ⟨10.4028/www.scientific.net/KEM.613.259⟩. ⟨hal-00992702⟩

• Communication dans un congrès

Synthesis and electrical characterisations of a low work function cesium oxide coating for high efficiency thermionic energy converter

François Morini, J.F. Robillard, Stéphane Monfray, I.D. Baikie, Thomas Skotnicki, Emmanuel Dubois

One main challenge associated with solid-state thermoelectric materials is to combine electron-crystal electrical conductivity and phonon-glass thermal properties that are difficult to conciliate. A markedly different principle of thermoelectric conversion is based on the micro-thermionic generator…

European Materials Research Society Spring Meeting, E-MRS Spring 2014, Symposium BB - Materials by design for energy applications through theory and experiment, 2014, Lille, France. ⟨hal-00966136⟩

• Article dans une revue

Dispersion properties and low infrared optical losses in epitaxial AlN on sapphire substrate in the visible and infrared range

Ali Soltani, Arnaud Stolz, Joël Charrier, Maghnia Mattalah, Jean-Claude Gerbedoen, Hassan Ali Barkad, Vincent Mortet, Michel Rousseau, Nour Eddine Bourzgui, Ali Benmoussa, Jean-Claude de Jaeger

Optical waveguiding properties of a thick wurtzite aluminum nitride highly [002]-textured hetero-epitaxial film on (001) basal plane of sapphire substrate are studied. The physical properties of the film are determined by X-ray diffraction, atomic force microscopy, microRaman, and photocurrent…

Journal of Applied Physics, 2014, 115 (16), pp.163515. ⟨10.1063/1.4873236⟩. ⟨hal-00987345⟩

• Article dans une revue

Effect of polarization switching cycles on the dielectric response and Rayleigh constant in Pb0.4Sr0.6TiO3 thin films

Kui Li, Xianlin Dong, Denis R Émiens, Tao Li, Ying Chen, Genshui Wang

Pb0.4Sr0.6TiO3 thin films with good fatigue endurance were crystallized at low temperature compatible with the current semiconductor technology. The effect of polarization switching cycles on the ferroelectric properties, dielectric response, and Rayleigh constant in thin films were systematically…

Journal of Applied Physics, 2014, 115 (6), pp.064102. ⟨10.1063/1.4864761⟩. ⟨hal-00947581⟩

• Communication dans un congrès

Step-conformal deposition of TiO2 and MnO2 electrodes on advanced silicon microstructures for 3D Li-ion microbatteries and micro-supercapacitors

Étienne Eustache, Camille Douard, Pascal Tilmant, Laurence Morgenroth, Pascal Roussel, Thierry Brousse, Christophe Lethien

To get autonomous smart microsystem, a miniaturized power source should be integrated. As the device is surface limited, the energy and power performances of commercially available planar microbatteries and micro-supercapacitors are not sufficient to reach this goal. To improve their performances…

European Materials Research Society Spring Meeting, E-MRS Spring 2014, 2014, Lille, France. ⟨hal-00976637⟩

• Article dans une revue

A study on effect of wafer bow in wafer-level BCB cap transfer packaging

Seonho Seok, Janggil Kim

This paper investigates the effects of wafer bow of Si carrier wafer to achieve high-yield BCB cap transfer in wafer-scale packaging. BCB caps are built-up on Si carrier wafer and then they are bonded and transferred to a target wafer. The height of BCB cap is 25 lm and the thickness of Si carrier…

Microsystem Technologies, 2014, 20, pp.215-219. ⟨10.1007/s00542-013-1780-5⟩. ⟨hal-00939051⟩

• Article dans une revue

Ingénierie des matériaux artificiels électromagnétiques : cristaux photoniques et métamatériaux

D. Lippens

Le développement des techniques de micro-structuration des matériaux diélectriques et des composés métalliques permet actuellement un contrôle sans précédent de l'interaction des ondes électromagnétiques avec les matériaux artificiels. Nous illustrons ici l'ingénierie de telles structures…

Photoniques, 2014, 69, pp.31-34. ⟨10.1051/photon/20146931⟩. ⟨hal-00954473⟩

• Article dans une revue

Gold-free ternary III-V antimonide nanowire arrays on silicon : twin-free down to the first bilayer

Sònia Conesa-Boj, Dominik Kriegner, Xiang-Lei Han, S.R. Plissard, Xavier Wallart, Julian Stangl, Anna Fontcuberta I Morral, Philippe Caroff

With the continued maturation of III-V nanowire research, expectations of material quality should be concomitantly raised. Ideally, III-V nanowires integrated on silicon should be entirely free of extended planar defects such as twins, stacking faults, or polytypism, position-controlled for…

Nano Letters, 2014, 14, pp.326-332. ⟨10.1021/nl404085a⟩. ⟨hal-00926662⟩