Publications

• Article dans une revue

Optimization of ohmic contact and adhesion on polysilicon in MEMS–NEMS wet etching process

Etienne Herth, Emmanuelle Algré, Bernard Legrand, Lionel Buchaillot

This paper presents the optimization of polysilicon doping and metallization to form ohmic contact with etching resistance. Indeed, polysilicon doped by ion implantation and ohmic contacts are an important and interesting part of integrated circuit technology or MEMS and NEMS. LPCVD-polysilicon…

Microelectronic Engineering, 2011, 88 (5), pp.724-728. ⟨10.1016/j.mee.2010.06.032⟩. ⟨hal-02300269⟩

• Article dans une revue

Materials chemistry for catalysis : coating of catalytic oxides on metallic foams

A. Essakhi, A. Löfberg, S. Paul, B. Mutel, P. Supiot, V. Le Courtois, P. Rodriguez, V. Meille, E. Bordes-Richard

Catalytic structured reactors are designed to improve both heat and mass transfers during reactions in the presence of catalytic layers. The know-how acquired in the coating of stainless steel walls by catalytic layers of VOx/TiO2, active in the abatement of volatile organic compounds and in the…

Microporous and Mesoporous Materials, 2011, 140, pp.81-88. ⟨10.1016/j.micromeso.2010.10.018⟩. ⟨hal-00572663⟩

• Article dans une revue

Exploit the bandwidth capacities of the perfluorinated graded index polymer optical fiber for multi-services distribution

C. Lethien, Christophe Loyez, Jean-Pierre Vilcot, N. Rolland, P.A. Rolland

The study reported here deals with the exploitation of perfluorinated graded index polymer optical fiber bandwidth to add further services in a home/office network. The fiber properties are exhibited in order to check if perfluorinated graded index plastic optical fiber (PFGI-POF) is suitable to…

Polymers, 2011, 3 (3), pp.1006-1028. ⟨10.3390/polym3031006⟩. ⟨hal-00639804⟩

• Article dans une revue

Golden ratio-based and tapered diptera inspired wings : their design and fabrication using standard MEMS technology

X.Q. Bao, Eric Cattan

Journal of Bionic Engineering, 2011, 8, pp.174-180. ⟨10.1016/S1672-6529(11)60023-1⟩. ⟨hal-00603032⟩

• Article dans une revue

Opposition control with arrayed actuators in the near-wall region of a spatially-developing turbulent boundary layer

M. Pamies, E. Garnier, A. Merlen, P. Sagaut

International Journal of Heat and Fluid Flow, 2011, 32, pp.621-630. ⟨10.1016/j.ijheatfluidflow.2011.03.005⟩. ⟨hal-00597083⟩

• Communication dans un congrès

Nanofils et énergie : un domaine en forte expansion

Pere Roca I Cabarrocas, C. Lethien, Thierry Brousse, N. Guillet, A. Gruss, Agnès Bonvilain, G. Savelli, J. Stockholm, Luc Brohan, S. Perraud, T. Pauporte

Séminaire Annuel de l'Observatoire des Micro et Nanotechnologies, 2011, Paris, France. ⟨hal-00574515⟩

• Communication dans un congrès

120nm AlSb/InAs HEMTs

Yannick Roelens, A. Olivier, A. Noudeviwa, L. Desplanque, Francois Danneville, Nicolas Wichmann, X. Wallart, S. Bollaert

TELECOM'2011 & 7èmes Journées Franco-Maghrébines des Micro-ondes et leurs Applications, 2011, Tanger, Maroc. CDROM, session A1, papier 185, 1-4. ⟨hal-00591362⟩

• Communication dans un congrès

Growth of self-catalyzed GaAs nanowire arrays on Si(111) using a VLS mechanism

S.R. Plissard, G. Larrieu, K.A. Dick, X. Wallart, P. Caroff

Thematic Days on Nanowires and Applications, GDR 2974, 2011, Villeneuve d'Ascq, France. ⟨hal-00591395⟩

• Article dans une revue

High sensitive matrix-free mass spectrometry analysis of peptides using silicon nanowires-based digital microfluidic device

Florian Lapierre, Gaëlle Piret, Hervé Drobecq, Oleg Melnyk, Yannick Coffinier, Vincent Thomy, Rabah Boukherroub

We present for the first time an electrowetting on dielectric (EWOD) microfluidic system coupled to a surface-assisted laser desorption-ionization (SALDI) silicon nanowire-based interface for mass spectrometry (MS) analysis of small biomolecules. Here, the transfer of analytes has been achieved on…

Lab on a Chip, 2011, 11 (9), pp.1620-1628. ⟨10.1039/C0LC00716A⟩. ⟨hal-00591341⟩

• Communication dans un congrès

Atom probe investigation of silicon nanowires grown by VLS and IPSLS

W. M. Chen, P. Pareige, B. Grandidier, D. Stievenard, Lianbo Yu, Pere Roca I Cabarrocas

Thematic Days on Nanowires and Applications, GDR 2974, 2011, Villeneuve d'Ascq, France. ⟨hal-00591402⟩