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Poster de conférence

SiC for Sensing in Harsh Environment

Marc Portail, Sylvain Kern, Clément Berger, Cécile Ghouila-Houri, Vincent Guigoz, Daniel Alquier, Ileana Florea, Isabelle Dufour, Abdelkrim Talbi, Philippe Pernod, Jean-François Michaud

International Conference on Silicon Carbide and Related Materials, Sep 2024, Rayleigh, North Carolina, United States. ⟨hal-04922976⟩

Brevet

Silicon tip with low quality and high aspect ratio, probe comprising such silicon tip, microscope comprising such probe, and method for manufacturing such silicon tip

Benjamin Walter, Edouard Lebouvier, Marc Faucher

France, Patent n° : FR3146998 (A1) 2024-09-27. 2024, N° de priorité : FR20230002658 20230322 - N° de demande : WO2023EP68407 20230704. ⟨hal-05652946⟩

Brevet

Silicon tip with low quality and high aspect ratio, probe comprising such silicon tip, microscope comprising such probe, and method for manufacturing such silicon tip

Benjamin Walter, Edouard Lebouvier, Marc Faucher

France, Patent n° : FR3146998 (A1) 2024-09-27. 2024, N° de priorité : FR20230002658 20230322 - N° de demande : WO2023EP68407 20230704. ⟨hal-05652959⟩

Brevet

Silicon tip having low mass and high aspect ratio, probe comprising such a silicon tip, microscope comprising such a probe, and method for manufacturing the silicon tip

Benjamin Walter, Edouard Lebouvier, Marc Faucher

France, Patent n° : FR3146998 (A1) 2024-09-27. 2024, N° de priorité : FR20230002658 20230322 - N° de demande : WO2023EP68407 20230704. ⟨hal-05652912⟩

Brevet

Silicon tip having low mass and high aspect ratio, probe comprising such a silicon tip, microscope comprising such a probe, and method for manufacturing the silicon tip

Benjamin Walter, Edouard Lebouvier, Marc Faucher

Unknown Region, Patent n° : WO2024194446 (A1) 2024-09-26. 2024, N° de priorité : FR20230002658 20230322 - N° de demande : WO2024EP57691 20240321. ⟨hal-05652913⟩