Publications

• Article dans une revue

Feedback of MEMS reliability study on the design stage : a step toward reliability aided design (RAD)

L. Buchaillot

Microelectronics Reliability, 2003, 43, pp.1919-1928. ⟨hal-00146437⟩

• Communication dans un congrès

2½ D microfabricated nib-like sources for nanoelectrospray applications

S. Le Gac, S. Arscott, C. Rolando

2003, pp.1211-1214. ⟨hal-00146442⟩

• Article dans une revue

Accurate modelling of large angle tilt (LATID) and pure vertical implantations : application to the simulation of n- and p-LDMOS backgates

Evelyne Lampin, Emmanuel Dubois, H. Xu, S. Bardy, F. Murray

The lateral and vertical extensions of the backgate of complementary laterally diffused metal oxide semiconductor (LDMOS) are simulated. The importance of channeling for a large-angle tilt implantation and a purely vertical (0°) implantation are studied with the atomistic simulator Crystal-TRIM.…

IEEE Transactions on Electron Devices, 2003, 50 (5), pp.1401-1404. ⟨10.1109/TED.2003.813464⟩. ⟨hal-00146392⟩

• Article dans une revue

Strain determination in silicon microstructures by combined TEM/CBED, process simulation and micro-Raman spectroscopy

V. Senez, A. Armigliato, I. de Wolf, G. Carnevale, R. Balboni, S. Frabboni, A. Benedetti

Test structures consisting of shallow trench isolation (STI) structures are fabricated using advanced silicon (Si) technology. Different process parameters and geometrical features are implemented to investigate the residual mechanical stress in the structures. A technology computer aided design…

Journal of Applied Physics, 2003, 94 (9), pp.5574-5583. ⟨10.1063/1.1611287⟩. ⟨hal-00146408⟩

• Article dans une revue

Low-profile directive quasi-planar antennas based on millimeter wave Fabry-Perot cavities

Ronan Sauleau, Philippe Coquet, T. Matsui

IEE Proceedings Microwaves Antennas and Propagation, 2003, 150 (4), pp.274-278. ⟨hal-00549362⟩

• Communication dans un congrès

Molecular scale electronics

D. Vuillaume

International Summer School on Advanced Microelectronics, MIGAS 2003, 2003, Autrans, France. ⟨hal-00146171⟩

• Communication dans un congrès

Chemistry of Si-H surfaces : from monolayers to nanometer-sized diodes

L. Baraton, J.P. Bourgoin, C. Chevrot, Serge Palacin, D. Vuillaume

French-USA Conference on Molecular-scale Electronics, 2003, Paris, France. ⟨hal-00146175⟩

• Article dans une revue

Molecular rectifying diodes from self-assembly on silicon

Stéphane Lenfant, Christophe Krzeminski, Christophe Delerue, Guy Allan, Dominique Vuillaume

Nano Letters, 2003, 3, pp.741-746. ⟨hal-00146156⟩

• Communication dans un congrès

Left-handed metamaterials : applications to the routing of electromagnetic waves

Tahsin Akalin, Thibaut Decoopman, Xavier Mélique, Olivier Vanbésien, Didier Lippens

Proceedings of the 2003 International Student Seminar on Microwave Applications of Novel Physical Phenomena, 2003, Espoo, Finland. ⟨hal-00146100⟩

• Communication dans un congrès

Avancées récentes des filières Silicium dans le domaine hyperfréquence

C. Raynaud, P. Chevalier, M. Laurens, S. Boret, B. van Haaren, R. Gwoziecki, C. Tinella, V. Knopik, S. Pruvost, Gilles Dambrine

2003, pp.INV2-1. ⟨hal-00145994⟩