Publications

• Article dans une revue

Impact of plasma pre-treatment before SiNx passivation on AlGaN/GaN HFETs electrical traps

Y. Guhel, B. Boudart, N. Vellas, Christophe Gaquière, E. Delos, D. Ducatteau, Z. Bougrioua, Marie Germain

Solid-State Electronics, 2005, 49, pp.1589-1594. ⟨hal-00154914⟩

• Article dans une revue

Fabrication and characterization of 100-nm In0.53Ga0.47As-In0.52Al0.48As double-gate HEMTs with two separate gate controls

Nicolas Wichmann, I. Duszynski, X. Wallart, S. Bollaert, A. Cappy

IEEE Electron Device Letters, 2005, 26, pp.601-603. ⟨hal-00154894⟩

• Article dans une revue

Reactive ion etching of a 20 nanometers tungsten gate using a SF$_6$/N$_2$ chemistry and hydrogen silsesquioxane hard mask resist

G. Larrieu, Emmanuel Dubois

This article reports on a direct method for patterning a tungsten gate in the decananometric range using high-resolution electron-beam lithography and reactive ion etching (RIE). Electron-beam lithography is based on the use of hydrogen silsesquioxane for its remarkable properties as a negative-…

Journal of Vacuum Science and Technology, 2005, 23 (5), pp.2046-2050. ⟨10.1116/1.2050654⟩. ⟨hal-00125635⟩

• Communication dans un congrès

Piezoelectric micro-machined ultrasonic transducer (pMUT) for energy harvesting

Karim Dogheche, B. Cavallier, P. Delobelle, L. Hirsinger, S. Ballandras, Eric Cattan, Denis Remiens, M. Marzencki, B. Charlot, Skandar Basrour

Micro-electromechanical devices dedicated to energy scavenging purpose have yield an increasing interest for a few years. In this paper we report on the fabrication of PZT/Si piezoelectric micro-machined ultrasonic transducers (pMUT) first designed to ultrasonic imaging applications that may be…

Ultrasonics Symposium, 18-21 Sept., Sep 2005, Rotterdam, Netherlands. pp.939 - 942, ⟨10.1109/ULTSYM.2005.1603005⟩. ⟨hal-00079975⟩

• Article dans une revue

Electrical damage induced by reactive ion-beam etching of lead-zirconate-titanate thin films

Caroline Soyer, Eric Cattan, Denis Remiens

Ion-beam etching of sputtered Pb(Zrx,Ti1-x)O3 (PZT) thin films with x equal to 0.54 grown on Pt/TiOx/SiO2/Si substrates has been performed using pure Ar gas and a varying CHF3/Ar gas mixing ratio. The etch rate dependence on the process parameters (gas composition, current density, and acceleration…

Journal of Applied Physics, 2005, 97 (11), pp.114110. ⟨10.1063/1.1923589⟩. ⟨hal-00130819⟩

• Communication dans un congrès

SU-8 based arch-like microfluidic microchannels using single mask/single step photolithography

M. Gaudet, S. Arscott, J.C. Camart, L. Buchaillot

2005, pp.1189-1192. ⟨hal-00130826⟩

• Communication dans un congrès

Effet du désordre dans un démultiplexeur nanométrique plasmonique

Maxime Beaugeois, Abdellatif Akjouj, Bahram Djafari-Rouhani, Jerome O. Vasseur, Yan Pennec, Mohamed Bouazaoui, Jean-Pierre Vilcot, Sophie Maricot, J.P. Vigneron, L. Dobrzynski

Congrès Général de la Société Française de Physique et de la Belgian Physical Society, Aug 2005, Lille, France. ⟨hal-00130845⟩

• Communication dans un congrès

Apodized filters on InP-material ridge waveguides using sampled Bragg gratings

S. Garidel, Jean-Pierre Vilcot, Didier Decoster

2005, pp.121. ⟨hal-00130829⟩

• Article dans une revue

Resonating piezoelectric membranes for microelectromechanically based bioassay: detection of streptavidin–gold nanoparticles interaction with biotinylated DNA

Liviu Nicu, M. Guirardel, F. Chambosse, P. Rougerie, S. Hinh, E. Trevisiol, J.M. Francois, Jean Pierre Majoral, A.M. Caminade, Eric Cattan, C. Bergaud

Sensors and Actuators B: Chemical, 2005, 110, pp.125-136. ⟨hal-00130821⟩

• Communication dans un congrès

MicroRaman analysis of resistance ohmic contact to n-AlGaN/GaN

A. Soltani, S. Touati, Virginie Hoel, Jean-Claude de Jaeger, J. Laureyns, Y. Cordier, C. Marhic, A. Djouadi, C. Dua

Proceedings of the 16th European Conference on Diamond, Diamond-Like Materials, Carbon Nanotubes and Nitrides, Diamond 2005, 2005, Toulouse, France. ⟨hal-00131350⟩