Publications

• Communication dans un congrès

3D self-assembling of SU-8 microstructures on silicon by plasma induced compressive stress

Jean-Baptiste Bureau, Bernard Legrand, Dominique Collard, Lionel Buchaillot

This paper presents the development of suspended movable microstructures made of SU-8 photoresist where compressive stress leads to 3D self-assembled microstructures. Internal compressive stress in the photoresist is induced by an SF/sub 6/ based plasma process. Clamped-clamped beam structures have…

13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05., Jun 2005, Seoul, South Korea. pp.19-22, ⟨10.1109/SENSOR.2005.1496348⟩. ⟨hal-00128655⟩

• Communication dans un congrès

Inelastic electron tunnelling in metal/alkylsilane/silicon junctions

K. Lmimouni, C. Petit, G. Salace, S. Lenfant, D. Vuillaume

ElecMol'05, 2005, Grenoble, France. ⟨hal-00125604⟩

• Communication dans un congrès

Recent advances in metallic source-drain engineering

J. Knock, Emmanuel Dubois, G. Larrieu, Xing Tang, N. Recklinger, V. Bayot

SINANO Workshop, 2005, Grenoble, France. ⟨hal-00138411⟩

• Article dans une revue

Nouvelles sources de nano-ESI microfabriquées dédiées à la proteomique

S. Le Gac, S. Arscott, C. Rolando

Spectra Analyse, 2005, 34, pp.20-25. ⟨hal-00138425⟩

• Communication dans un congrès

Transformation of hydrogen silsexquioxane properties with RIE plasma treatment for advanced multiple-gate MOSFETs

J. Penaud, F. Fruleux, Emmanuel Dubois

2005, pp.P-P.15. ⟨hal-00138399⟩

• Communication dans un congrès

Caractérisation THz de lignes de Goubau par échantillonnage électro-optique pour BioMEMS cellulaire

A. Treizebre, Tahsin Akalin, L. Desplanque, Jean-Francois Lampin, Bertrand Bocquet

7èmes Journées des Phénomènes Ultra-rapides, 2005, Villeneuve d'Ascq, France. ⟨hal-00147497⟩

• Communication dans un congrès

Multicouches magnétostrictives Tb/TbFe2. Etude Mössbauer de la texture magnétique

J. Juraszek, T. Hauet, S. Mangin, Nicolas Tiercelin, J. Teillet

10ème Colloque Louis Neel, Couches Minces et Nanostructures Magnétiques, 2005, Dourdan, France. ⟨hal-00138387⟩

• Article dans une revue

Fabrication and characterization of 1.1 GHz blade nanoelectromechanical resonator

Vincent Agache, Bernard Legrand, Dominique Collard, Lionel Buchaillot, Hiroyuki Fujita

An electromechanical resonator based on a blade geometry is proposed in this letter. This particular geometry allows self-alignment of the mechanical resonator structure to its lateral electrodes while achieving high eigenfrequencies in the GHz range. This letter reports both the fabrication…

Applied Physics Letters, 2005, 86, pp.213104-1-3. ⟨10.1063/1.1929873⟩. ⟨hal-00125633⟩

• Communication dans un congrès

Role of interface on the direct tunneling and the inelastic tunneling behaviors in metal/alkylsilane/silicon junctions

D. Vuillaume, D. K. Aswal, David Guérin, S. Lenfant, C. Petit, G. Salace, J. V. Yakhmi

French-Russian workshop on nanosciences and nanotechnologies, 2005, Lille, France. ⟨hal-00125618⟩

• Communication dans un congrès

Monitoring capillary endothelial cell culture and capillary formation in a microdevice by impedance spectroscopy measurements

K. Rissanen, S. Ostrovidov, E. Lennon, V. Senez, J. Kim, B. Kim, K.S. Furukawa, T. Ushida, Y. Sakai, T. Fujii

2005, pp.201-204. ⟨hal-00130852⟩