Publications

• ART

Correlation between threading dislocation density and the refractive index of AlN grown by molecular-beam epitaxy on Si(111)

F. Natali, F. Semond, J. Massies, D. Byrne, S. Laugt, O. Tottereau, P. Vennegues, El Hadj Dogheche, E. Dumont

Applied Physics Letters, 2003, 82, pp.1386-1388. ⟨hal-00162730⟩

• ART

Hydrothermal synthesis of PbTiO3 ferroelectric films : characterizations with large frequency and temperature ranges and sensor application

Didier Fasquelle, Jean-Claude Carru, S. Euphrasie, Philippe Pernod, S. Daviero-Minaud

Hydrothermal synthesis is an original way for the deposition of ferroelectric films. It allows to deposit a film with a few micrometers thick on a titanium substrate with various geometrical shapes. X-ray diffraction studies have shown a good nucleation without preferential orientation. S.E.M…

Ferroelectrics, 2003, 288 (1), pp.39-48. ⟨10.1080/00150190390212070⟩. ⟨hal-00146117⟩

• COMM

Micro-electromechanical variable-bandwidth IF frequency filters with tunable electrostatical coupling spring

D. Galayko, A. Kaiser, L. Buchaillot, D. Collard, C. Combi

2003, pp.153-156. ⟨hal-00146404⟩

• ART

Fabrication and characterization of a SU-8 gripper actuated by SMA thin film

I. Roch, P. Bidaud, D. Collard, L. Buchaillot

Journal of Micromechanics and Microengineering, 2003, 13, pp.330-336. ⟨hal-00146418⟩

• COMM

Fiabilité des microstructures en polysilicium : création de bancs de test in situ

O. Millet, D. Collard, L. Buchaillot

16ème Congrès Francais de Mécanique, 2003, Nice, France. ⟨hal-00146455⟩

• COMM

Micro gripper driven by SDAs coupled to an amplification mechanism

O. Millet, P. Bernardoni, S. Regnier, P. Bidaud, D. Collard, L. Buchaillot

2003, pp.280-283. ⟨hal-00146439⟩

• COMM

Finite volume methods for wave phase conjugation in active media

A. Merlen, P. Voinovitch, Vladimir Preobrazhensky, Philippe Pernod

6th International Conference on Mathematical and Numerical Aspects of Wave Propagation, WAVES 2003, 2003, Finland. pp.765-769. ⟨hal-00250177⟩

• COMM

Raman characterization of Mg+ ion-implanted GaN

B. Boudart, Yannick Guhel, J. C. Pesant, Paul Dhamelincourt, M.A. Poisson

7th International Workshop on Beam Injection Assessment of Microstructures in Semiconductors, 2003, Lille, France. ⟨hal-01649531⟩

• ART

Deposition of ferroelectric BST thin films by sol gel route in view of electronic applications

G. Velu, Jean-Claude Carru, Eric Cattan, Denis Remiens, X. Melique, D. Lippens

We report on the deposition of Ba 0.7 Sr 0.3 TiO 3 thin films, BST (70/30), by a sol-gel process. After deposition by spin coating, the film is annealed at 750°C, one hour in air. BST films have been deposited on (111) silicon substrates (bare and platinum coated) and on (0001) sapphire. X-Ray…

Ferroelectrics, 2003, 288 (1), pp.59-69. ⟨10.1080/00150190390212007⟩. ⟨hal-00146068⟩

• COMM

Giant magnetostriction nanostructures for actuation of microsystems

Philippe Pernod, Vladimir Preobrazhensky

2003, pp.7. ⟨hal-00146135⟩