Publications

Affichage de 14351 à 14360 sur 16064


  • Communication dans un congrès

Modeling and experimental validation of silicon nanotip oxidation : towards a nanoelectromechanical filter application

Vincent Agache, Patrice Bigotte, Bernard Legrand, Vincent Senez, Lionel Buchaillot, Dominique Collard

This study aims at modeling the thermal oxidation of silicon pedestals leading to the formation of sharp silicon tips. The model is used to determine optimum process parameters taking into account the initial shape of the silicon pedestal shapes, and the geometry of the desired tip. Experimental…

12th International Conference on Solid-State Sensors, Jun 2003, Boston, United States. pp.1287-1290, ⟨10.1109/SENSOR.2003.1217008⟩. ⟨hal-00146438⟩

  • Communication dans un congrès

A 100V-IC for the remote powering and control of a microrobot using an electrostatic ciliary motion system

Philippe Basset, A. Kaiser, B. Stefanelli, M. Walenne, D. Collard, L. Buchaillot

2003, pp.1711-1713. ⟨hal-00146436⟩

  • Communication dans un congrès

Antennes et réseaux d'antennes millimétriques multi-couches micro-usinées sur Silicium

Arc'Hanmael Gaillard, Ronan Sauleau, Hervé Lhermite, Philippe Coquet

Treizièmes Journées Nationales Micro-ondes, May 2003, Lille, France. 4 p. ⟨hal-00553226⟩

  • Communication dans un congrès

Detection of chemical damage in concrete cover using ultrasound

F. Buyle-Bodin, S. Ould Naffa, M. Goueygou, Bogdan Piwakowski

Proceedings of the 2003 International Conference on Performance of Construction Materials in the New Millennium, ICPCM 2003, 2003, Cairo, Egypt. ⟨hal-00250183⟩

  • Chapitre d'ouvrage

Characterization of surface cracks in metals by microwave techniques

D. Glay, T. Lasri

GREEN R.E. JR., DJORDJEVIC B.B., HENTSCHEL M.P. Nondestructive characterization of materials XI, Springer Verlag, pp.345-352, 2003. ⟨hal-00132310⟩

  • Communication dans un congrès

Les Interconnexions cuivre sont-elles un verrou technologique majeir pour les circuits ULSI du futur utilisant la technologie ultime ? Analyse électromagnétique et performances

K. El Bouazzati, Jean-François Legier, Erick Paleczny, Christophe Seguinot, Denis Deschacht

Telecom et JFMMA, 2003, Marrakech, Maroc. ⟨lirmm-00269827⟩

  • Communication dans un congrès

Sub 0.1 µm – InP based HEMTs for high power and high frequency

D. Theron, F Medjdoub, M. Zaknoune, X. Wallart, F. Dessenne, R. Fauquembergue, Jean-Claude de Jaeger

Workshop on Compound Semiconductor Materials and Devices, WOCSEMMAD 2003, 2003, Atlanta, GA, United States. ⟨hal-00146719⟩

  • Article dans une revue

Realization of waveguiding epitaxial GaN layers on Si by low-pressure metalorganic vapor phase epitaxy

H.P.D. Schenk, E. Feltin, M. Laugt, O. Tottereau, P. Vennegues, El Hadj Dogheche

Applied Physics Letters, 2003, 83, pp.5139-5141. ⟨hal-00162728⟩