Publications

• Article dans une revue

Statics and dynamics in giant magnetostrictive TbxFe1-xFe0.6Co0.4 multilayers for MEMS

Jamal Ben Youssef, Nicolas Tiercelin, Fabienne Petit, Henri Le Gall, Vladimir Preobrazhensky, Philippe Pernod

IEEE Transactions on Magnetics, 2002, 38, pp.2817-2819. ⟨hal-00148689⟩

• Article dans une revue

Reactive ion beam etching effects on maskless PZT properties

Caroline Soyer, Eric Cattan, Denis Remiens

Ion beam etching of sputtered Pb(Zr 0.54 ,Ti 0.46 )O 3 has been performed using pure Ar gas. The etch rate and selectivity ratios between PZT and masks as a function of the process parameters (current density, acceleration voltage, gas pressure) has been investigated. We have evaluated the PZT…

Integrated Ferroelectrics, 2002, 48, pp.221-229. ⟨10.1080/10584580215465⟩. ⟨hal-00149624⟩

• Communication dans un congrès

Transient modeling of Lamb wave generation by surface bonded piezoelectric transducers

Laurent Duquenne, Emmanuel Moulin, Jamal Assaad, Christophe Delebarre

Since a few years, Lamb waves have been seriously considered as a potential technique for integrated damage assessment systems. Since they are easily propagated over long distances in plate-shaped structures and are able to interact with inner material defects, Lamb waves are seen indeed as a most…

European Workshop on Smart Structures in Engineering and Technology, May 2002, Giens, France. ⟨10.1117/12.508723⟩. ⟨hal-00149930⟩

• Article dans une revue

A modified bosch-type process for precise surface micromachining of polysilicon

E. Quevy, B. Parvais, J.P. Raskin, L. Buchaillot, D. Flandre, D. Collard

Journal of Micromechanics and Microengineering, 2002, 12, pp.328-333. ⟨hal-00148763⟩

• Article dans une revue

Characterisation of micromachining processes during KrF excimer laser ablation of TiNi shape memory alloy thin sheets and films

S.T. Davies, E.C. Havey, H. Jin, J.P. Hayes, M.K. Ghantasala, I. Roch, L. Buchaillot

Smart Materials and Structures, 2002, 11, pp.708-714. ⟨hal-00148762⟩

• Communication dans un congrès

Caractérisation de films minces d'alliages à mémoire de forme par acoustique picoseconde

R. Cote, Arnaud Devos, I. Roch, L. Buchaillot

2002, pp.304-307. ⟨hal-00147776⟩

• Article dans une revue

Surface micro-machining : an overview

D. Collard, H. Fujita, H. Toshiyoshi, Bernard Legrand, L. Buchaillot

Nano et micro technologies, 2002, 2, pp.35-50. ⟨hal-00148781⟩

• Article dans une revue

Adhesive forces investigation on a silicon tip by contact mode atomic force microscope

Vincent Agache, Bernard Legrand, Dominique Collard, Lionel Buchaillot

An atomic force microscope operating in contact mode is used in this letter for probing the adhesive forces at the apex of a silicon nanotip with typical radius smaller than 15 nm, fabricated using a combination of high-resolution electron beam lithography and plasma dry etching. The amplitude of…

Applied Physics Letters, 2002, 81, pp.2623-2625. ⟨10.1063/1.1508806⟩. ⟨hal-00148768⟩

• Chapitre d'ouvrage

Numerical modeling of sonic and ultrasonic devices

Bertrand Dubus

RANZ-GUERRA C., GALLEGO-JUAREZ J.A. New acoustics - Selected topics, Ed. Consejo Superior de Investigaciones Científicas (CSIC), Madrid, Spain, pp.37-74, 2002. ⟨hal-00132554⟩

• Communication dans un congrès

Detection and characterization of underground cavities using high resolution seismic reflection (HRSR)

Lynda Driad, Bogdan Piwakowski

Old Underground mining works are subjected to risks of collapse of which the assessment is a complex process. In the case of inaccessible Underground mines, the difficult task for the risk assessment is to classify the already collapsed zones (no further risk) from still stable structures which may…

8. Meeting Environmental and Engineering Geophysics, Sep 2002, Aveiro, Portugal. pp.31-34. ⟨ineris-00972374⟩