Publications

• Article dans une revue

A modified bosch-type process for precise surface micromachining of polysilicon

E. Quevy, B. Parvais, J.P. Raskin, L. Buchaillot, D. Flandre, D. Collard

Journal of Micromechanics and Microengineering, 2002, 12, pp.328-333. ⟨hal-00148763⟩

• Article dans une revue

Characterisation of micromachining processes during KrF excimer laser ablation of TiNi shape memory alloy thin sheets and films

S.T. Davies, E.C. Havey, H. Jin, J.P. Hayes, M.K. Ghantasala, I. Roch, L. Buchaillot

Smart Materials and Structures, 2002, 11, pp.708-714. ⟨hal-00148762⟩

• Communication dans un congrès

Caractérisation de films minces d'alliages à mémoire de forme par acoustique picoseconde

R. Cote, Arnaud Devos, I. Roch, L. Buchaillot

2002, pp.304-307. ⟨hal-00147776⟩

• Article dans une revue

Surface micro-machining : an overview

D. Collard, H. Fujita, H. Toshiyoshi, Bernard Legrand, L. Buchaillot

Nano et micro technologies, 2002, 2, pp.35-50. ⟨hal-00148781⟩

• Article dans une revue

Adhesive forces investigation on a silicon tip by contact mode atomic force microscope

Vincent Agache, Bernard Legrand, Dominique Collard, Lionel Buchaillot

An atomic force microscope operating in contact mode is used in this letter for probing the adhesive forces at the apex of a silicon nanotip with typical radius smaller than 15 nm, fabricated using a combination of high-resolution electron beam lithography and plasma dry etching. The amplitude of…

Applied Physics Letters, 2002, 81, pp.2623-2625. ⟨10.1063/1.1508806⟩. ⟨hal-00148768⟩

• Chapitre d'ouvrage

Numerical modeling of sonic and ultrasonic devices

Bertrand Dubus

RANZ-GUERRA C., GALLEGO-JUAREZ J.A. New acoustics - Selected topics, Ed. Consejo Superior de Investigaciones Científicas (CSIC), Madrid, Spain, pp.37-74, 2002. ⟨hal-00132554⟩

• Communication dans un congrès

Detection and characterization of underground cavities using high resolution seismic reflection (HRSR)

Lynda Driad, Bogdan Piwakowski

Old Underground mining works are subjected to risks of collapse of which the assessment is a complex process. In the case of inaccessible Underground mines, the difficult task for the risk assessment is to classify the already collapsed zones (no further risk) from still stable structures which may…

8. Meeting Environmental and Engineering Geophysics, Sep 2002, Aveiro, Portugal. pp.31-34. ⟨ineris-00972374⟩

• Chapitre d'ouvrage

Noise modeling and measurement techniques in deep submicron SOI devices

Francois Danneville, Gilles Dambrine

Balandin A. Noise and Fluctuations Control in Electronic Devices, American Scientific Publishers, pp.355-365, 2002. ⟨hal-00577023⟩

• Communication dans un congrès

Underwater flat-panel transducer array

R.E. Newnham, S. Alkoy, Anne-Christine Hladky, W.J. Hughes, D.C. Markley, R.J. Meyer

6ème Congrès Français d'Acoustique, CFA 2002, 2002, Lille, France. ⟨hal-00147790⟩

• Communication dans un congrès

Design and analysis of piezoelectric transducers using the finite element method

Anne-Christine Hladky

Piezoelectric Materials for the End User Symposium, 2002, Interlaken, Switzerland. ⟨hal-00147791⟩