Publications

Affichage de 4361 à 4370 sur 16231


  • Communication dans un congrès

Micro-Electro-Mechanical-Systems advances for measurements at small scales: the vertical silicon probes technology extended to nearfield optics

B. Walter, E. Mairiaux, Sophie Eliet, Jean-Francois Lampin, Marc Faucher

Instrumentation intending to go beyond the limits of current Atomic Force Microscope setups (AFM), and applications requiring AFM to be integrated in non-standards environmental conditions need sensors that overcome limitations given by available probes. We show that the vertical probe technology…

2019 International Conference on Manipulation, Automation and Robotics at Small Scales (MARSS 2019), Jul 2019, Helsinki, Finland. pp.1-5, ⟨10.1109/MARSS.2019.8860980⟩. ⟨hal-03321928⟩

  • Chapitre d'ouvrage

La végétronique : les MEMS se végétalisent

Lionel Buchaillot

Inventer l'avenir, l'ingénierie se met au vert, 2019. ⟨hal-02390878⟩