Publications

Affichage de 7491 à 7500 sur 16179


  • Article dans une revue

Fabrication of silicon nanostructures using metal-assisted etching in NaBF4

N.T.P. Nguyen, Yannick Coffinier, V. Thomy, Rabah Boukherroub

Physica Status Solidi A (applications and materials science), 2013, 210, pp.2178-2182. ⟨10.1002/pssa.201330035⟩. ⟨hal-00877646⟩

  • Article dans une revue

Preface for the special issue of MTAP following CBMI 2011

José M. Martínez, Bernard Merialdo, Jenny Benois-Pineau, Joemon Jose

Multimedia Tools and Applications, 2013, 62 (1), pp.1 - 4. ⟨10.1007/s11042-011-0927-6⟩. ⟨hal-01437497⟩

  • Article dans une revue

MEMS piezoresistive ring resonator for AFM imaging with pico-Newton force resolution

Z. Xiong, B. Walter, E. Mairiaux, M. Faucher, L. Buchaillot, Bernard Legrand

Journal of Micromechanics and Microengineering, 2013, 23, pp.035016-1-10. ⟨10.1088/0960-1317/23/3/035016⟩. ⟨hal-00795965⟩