Publications

• Thèse

Conception de microsystèmes à base d'actionneurs en SU8 pour la manipulation de micro-objets en milieu liquide et transfert vers milieu quasi-sec, Design, fabrication and characterization of SU8-based microactuators for manipulation of micro-objects in wet environment and extraction from a wet to an almost-dry environment

Matthieu Lagouge

Le développement des technologies microsystèmes a permis l'apparition de composants capables de manipuler et d'effectuer des mesures sur des microobjets, en utilisant des techniques variées. Ces travaux présentent une contribution aux outils de manipulation de microobjets, en s'…, The development of microsystems technologies has enabled the emergence of devices able to manipulate and make measurements on microobjects using different techniques. This study proposes a contribution to microobject manipulation tools, built using SU8 photoresist made actuators and microchannels…

Micro et nanotechnologies/Microélectronique. Université des Sciences et Technologie de Lille - Lille I, 2006. Français. ⟨NNT : ⟩. ⟨tel-00084755⟩

• Article dans une revue

Charge-injection mechanisms in semiconductor nanoparticles analyzed from force microscopy experiments

Sophie Barbet, Thierry Melin, Heinrich Diesinger, D. Deresmes, Didier Stiévenard

Charge-injection and electric force microscopy experiments are performed in silicon nanoparticles deposited on a doped silicon substrate. We address in this paper the issue of the nanoparticle charging mechanisms. The nanoparticle charging is shown to occur in a regime of permanent current flow…

Physical Review B: Condensed Matter and Materials Physics (1998-2015), 2006, 73, pp.045318. ⟨10.1103/PhysRevB.73.045318⟩. ⟨hal-00127820⟩

• Communication dans un congrès

Generation and coherent detection of terahertz radiation by photomixing : dielectric media characterization

Sophie Matton, Gaël Mouret, Robin Bocquet, Francis Hindle, D. Bigourd, D. Lippens, Jean-Francois Lampin

New results from a far infrared coherent detection scheme are presented. Photomixing has been used for homodyne detection to measure absorption and dispersion of dielectric media. The abnormal dispersion near a rotational transition of carbonyl sulfide has been examined.

The Joint 30th International Conference on Infrared and Millimeter Waves and 13th International Conference on Terahertz Electronics, IRMMW-THz 2005, Sep 2005, Williamsburg, United States. pp.419-420. ⟨hal-00154903⟩

• Article dans une revue

Variation of absorption coefficient and determination of critical dose of SU-8 at 365 nm

Matthieu Gaudet, Jean-Christophe Camart, Lionel Buchaillot, S. Arscott

Applied Physics Letters, 2006, 88 (2), pp.024107. ⟨10.1063/1.2164390⟩. ⟨hal-02347482⟩

• Brevet

Piezoelectrically-controlled microswitch

G. Caruyer, G. Bouche, P. Ancey

Patent n° : WO2006000731 (A1). 2006. ⟨hal-00372368⟩

• Chapitre d'ouvrage

Multipurpose textile-based sensors

Cédric Cochrane, B. Kim, Vladan Koncar, C. Dufour

Mattila H.R. Intelligent Textiles and Clothing, Woodhead Publishing Ltd, Cambridge, UK, pp.324-341, 2006, ⟨10.1533/9781845691622.3.324⟩. ⟨hal-00577014⟩

• Autre publication scientifique

Microsystèmes magnéto mécaniques (MMMS) pour le contrôle actif d'écoulements aérauliques

O. Ducloux

2006. ⟨hal-00138645⟩

• Communication dans un congrès

Digital solution for inter-vehicle localisation system by means of Direction-Of-Arrival

V.Y. Vu, A. Benlarbi-Delaï

International Symposium on Intelligent Signal Processing and Communication Systems, ISPACS 2006, 2006, Japan. pp.875-878, ⟨10.1109/ISPACS.2006.364781⟩. ⟨hal-00241356⟩

• Article dans une revue

TEM study of iridium silicide contact layers for low Schottky barrier MOSFETs

A. Laszcz, A. Czerwinski, J. Ratajczak, J. Katcki, N. Breil, G. Larrieu, Emmanuel Dubois

An influence of annealing temperatures (300, 400 and 500°C) on the iridium silicide formation in the Ir/Si structure was analysed by means of the transmission electron microscopy (TEM). The silicide layer is formed by the solid-state reaction b etween 15 nm thick Ir metallisation and a Si layer…

Archives of Metallurgy and Materials, 2006, 51 (4), pp.551-554. ⟨hal-00152968⟩

• Article dans une revue

Coupled-resonator micromechanical filters with voltage tuneable bandpass characteristic in thick-film polysilicon technology

Dimitri Galayko, Andreas Kaiser, Bernard Legrand, Lionel Buchaillot, Dominique Collard, Chantal Combi

This paper reports on the design and characterization of 2.4 and 9.2 MHz fourth and sixth order passband microelectromechanical coupled-resonator filters implemented in a 15 μm thick-film epitaxial polysilicon technology. The work uses a novel approach in the building of coupled-resonator…

Sensors and Actuators A: Physical , 2006, 126 (1), pp.227-240. ⟨10.1016/j.sna.2005.10.033⟩. ⟨hal-01195973⟩