Publications

• Communication dans un congrès

Vers une imagerie par spectrométrie de masse clinique à haut débit

M. Wisztorski, R. Lemaire, O. Jardin-Mathe, C. Courcelle, V. Thomy, J.B. Hendra, P. Ducoroy, M. Salzet, I. Fournier

Journée Innovations en Protéomique, 1ères rencontres du MASTER Protéomique de Lille, 2005, Villeneuve d Ascq, France. ⟨hal-00126223⟩

• Communication dans un congrès

Friction driven micromotors with both clockwise and counterclockwise rotations

Bernard Legrand, Lionel Buchaillot, Dominique Collard

This submission presents friction driven angular micro-motors that demonstrate both clockwise (CW) and counter clockwise (CCW) rotations with a single set of mechanical converters. Fabrication technology is based on surface micromachining of polycrystalline silicon layers in thin films. Rotor…

17e Congrès Français de Mécanique, 2005, Troyes, France. ⟨hal-04279573⟩

• Communication dans un congrès

Characterization of vertical vibration of electrostatically actuated resonators using Atomic Force Microscope in noncontact mode

Vincent Agache, Bernard Legrand, K. Nakamura, H. Kawakatsu, Lionel Buchaillot, Hiroshi Toshiyoshi, Dominique Collard, Hiroyuki Fujita

Non contact mode atomic force microscope (AFM) direct characterization of out-of-plane fixed-fixed high frequency microelectromechanical resonators is examined while applying the excitation voltage to integrated electrostatic transducers. Non contact mode is rather used than contact mode in order…

The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005, Jun 2005, Seoul, South Korea. pp.2023-2026, ⟨10.1109/SENSOR.2005.1497499⟩. ⟨hal-00125631⟩

• Communication dans un congrès

RF blade nano-electromechanical resonator with self-aligned process for definition of lateral electrostatic transducers

Vincent Agache, Bernard Legrand, Dominique Collard, Hiroyuki Fujita, Lionel Buchaillot

In this paper, the design, fabrication, and characterization of a new class of electromechanical resonator based on a blade geometry is proposed. This particular geometry allows self-alignment of the mechanical resonator to its lateral electrodes with nanometer scale lateral gap (<50 nm), while…

Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2005, 2005, Montreux, Switzerland. pp.26-31. ⟨hal-00128656⟩

• Communication dans un congrès

The 2D feedback conveyance with ciliary actuator arrays

M. Ataka, Bernard Legrand, L. Buchaillot, D. Collard, H. Fujita

2005, pp.31-34. ⟨hal-00125659⟩

• Article dans une revue

Modeling and experimental validation of sharpening mechanism based on thermal oxidation for fabrication of ultra-sharp silicon nanotips

Vincent Agache, Roger Ringot, Patrice Bigotte, Vincent Senez, Bernard Legrand, Lionel Buchaillot, Dominique Collard

This paper aims at modeling the thermal oxidation of silicon pillars leading to the formation of very sharp silicon tips. The model is used to determine optimum process parameters with respect to the initial shape of the silicon pillars and the geometry of the desired tip. The modeling concept is…

IEEE Transactions on Nanotechnology, 2005, 4, pp.548-556. ⟨10.1109/TNANO.2005.851386⟩. ⟨hal-00125632⟩

• Article dans une revue

Study of structural and optical properties of InSb-doped SiO₂ thin films

B. Capoen, V.Q. Lam, S. Turrell, Jean-Pierre Vilcot, F. Beclin, Y. Jestin, M. Bouazaoui

The non-linear absorption and the structure of rf-cosputtered SiO2:InSb films were investigated after different heat-treatments at temperatures ranging from 200 to 900 °C. The heat-treatment was 1 min or 4 h in an atmosphere of nitrogen or under vacuum, respectively. After annealing at a…

• Communication dans un congrès

A compact low noise amplifier in SiGe:C BiCMOS technology for 40 GHz wireless communications

S. Pruvost, I. Telliez, Francois Danneville, A. Chantre, P. Chevalier, Gilles Dambrine, Sylvie Lepilliet

2005, pp.565-568. ⟨hal-00125166⟩

• Article dans une revue

Density of states measured by scanning-tunneling spectroscopy sheds new light on the optical transitions in PbSe nanocrystals

Peter Liljeroth, P.A. Zeijlmans van Emmichoven, Stephen G. Hickey, Horst Weller, B. Grandidier, Guy Allan, Daniel Vanmaekelbergh

The density-of-states function of individual colloidal PbSe nanocrystals varying in diameter between 3 and 7 nm is measured by resonant tunneling spectroscopy. It is in semiquantitative agreement with tight-binding calculations, but the energy separation between electron (hole) levels of S and P…

Physical Review Letters, 2005, 95, pp.086801/1-4. ⟨hal-00126240⟩

• Communication dans un congrès

Fabrication of III-V/polymer optical nanowires and nanogratings for nanophotonic devices

D. Lauvernier, Jean-Pierre Vilcot, Didier Decoster

2005, pp.449-459. ⟨hal-00126236⟩