Publications

• Article dans une revue

Fabrication and characterization of 100-nm In0.53Ga0.47As-In0.52Al0.48As double-gate HEMTs with two separate gate controls

Nicolas Wichmann, I. Duszynski, X. Wallart, S. Bollaert, A. Cappy

IEEE Electron Device Letters, 2005, 26, pp.601-603. ⟨hal-00154894⟩

• Article dans une revue

Reactive ion etching of a 20 nanometers tungsten gate using a SF$_6$/N$_2$ chemistry and hydrogen silsesquioxane hard mask resist

G. Larrieu, Emmanuel Dubois

This article reports on a direct method for patterning a tungsten gate in the decananometric range using high-resolution electron-beam lithography and reactive ion etching (RIE). Electron-beam lithography is based on the use of hydrogen silsesquioxane for its remarkable properties as a negative-…

Journal of Vacuum Science and Technology, 2005, 23 (5), pp.2046-2050. ⟨10.1116/1.2050654⟩. ⟨hal-00125635⟩

• Communication dans un congrès

Piezoelectric micro-machined ultrasonic transducer (pMUT) for energy harvesting

Karim Dogheche, B. Cavallier, P. Delobelle, L. Hirsinger, S. Ballandras, Eric Cattan, Denis Remiens, M. Marzencki, B. Charlot, Skandar Basrour

Micro-electromechanical devices dedicated to energy scavenging purpose have yield an increasing interest for a few years. In this paper we report on the fabrication of PZT/Si piezoelectric micro-machined ultrasonic transducers (pMUT) first designed to ultrasonic imaging applications that may be…

Ultrasonics Symposium, 18-21 Sept., Sep 2005, Rotterdam, Netherlands. pp.939 - 942, ⟨10.1109/ULTSYM.2005.1603005⟩. ⟨hal-00079975⟩

• Communication dans un congrès

Design of low-frequency ultrasonic sensors for the analysis of the draining stage of cheese production

Georges Nassar, M.N. Sabra, Fabrice Lefebvre, Malika Toubal, Bertrand Nongaillard, Yolande Noël

This work presents a new ultrasonic system with a transmission mode in the 100-200 kHz frequency range. The system, composed of ultrasonic point sources, is used to monitor the mechanical properties of cheese during the early phases of production. First, our specialized sensor system is presented,…

Proceedings of the 2005 Joint World Congress on Ultrasonics/Ultrasonics International, WCU/UI'05, Aug 2005, Beijing, China. ⟨10.1016/j.ultras.2006.05.100⟩. ⟨hal-00140797⟩

• Communication dans un congrès

Field model for V(z) evaluation ant its application in material characterization

Wei-Jiang Xu, Mohamed Ourak

Proceedings of the 2005 Joint World Congress on Ultrasonics/Ultrasonics International, WCU/UI'05, 2005, Beijing, China. ⟨hal-00140794⟩

• Communication dans un congrès

Modal theory in rectangular tunnels for interpreting MIMO channels properties

M. Lienard, Pierre Degauque, J. Molina-Garcia-Pardo, L. Leandro-Juen-Llacer

Proceedings of Cost 273 Meeting, TD (05), 2005, Lisbon, Portugal. ⟨hal-00140803⟩

• Communication dans un congrès

Transmission through and reflection from a fluid elastic layer : quasi-linear approximation

L. Haumesser, Olivier Bou Matar, S. dos Santos, F. Vander Meulen

Joint Workshop of Russian Acoustical Society (RAS) and French Acoustical Society (SFA) as part of XVI Meeting of Russian Acoustical Society, 2005, Russia. pp.75-80. ⟨hal-00247437⟩

• Article dans une revue

In situ laser assisted diagnostics on growth of thick PACVD organosilicon films

Philippe Supiot, Céline Vivien, M. Aimard, R. Sumera, Bertrand Bocquet

The purpose of the present work is to determine the growth rate of an organosilicon film during the deposition process. The films are obtained from the chemical decomposition of the 1,1,3,3 TetraMethylDiSilOxane (TMDSO) monomer premixed with oxygen by reaction in the far remote afterglow of a…

High Temperature Material Processes: An International Quarterly of High-Technology Plasma Processes, 2005, 9 (2), pp.287-297. ⟨10.1615/HighTempMatProc.v9.i2.110⟩. ⟨hal-00247652⟩

• Communication dans un congrès

Electrical properties of PANI-Dyneema® conductive fibres – Fuzzy logic modelling

B. Kim, V. Koncar, C. Dufour

3rd International Industrial Simulation Conference, ISC'2005, 2005, Berlin, Germany. ⟨hal-00247653⟩

• Communication dans un congrès

Amplificateur faible bruit pour applications millimétriques à 40 GHz utilisant les transistors bipolaires à hétérojonction SiGeC d'une technologie BiCMOS

S. Pruvost, I. Telliez, Francois Danneville, A. Chantre, P. Chevallier, Gilles Dambrine, Sylvie Lepilliet

Actes des 14èmes Journées Nationales Microondes, 2005, Nantes, France. ⟨hal-00247448⟩