Thomas Arnoult, Cécile Ghouila-Houri, Colin Leclercq, Aurélien Mazzamurro, Romain Viard, Eric Garnier, Denis Sipp, Alain Merlen, Abdelkrim Talbi, Philippe Pernod

This paper presents and discusses micro-magneto-mechanical valves designed for cavity flow control. Realized using microfabrication techniques and rapid prototyping, the micro-valves exhibit a small footprint and adequate performances for low-speed cavity flow control. An array of 15 micro-valves…

2021 IEEE Sensors, Oct 2021, Sydney, Australia. pp.1-4, ⟨10.1109/SENSORS47087.2021.9639871⟩. ⟨hal-03501259⟩

Communication dans un congrès

Polydimethylsiloxane micro-channels application for the study of dynamic wetting of nano-etched silicon surfaces based on acoustic characterization method

Abbas Salhab, Julien Carlier, Pierre Campistron, M. Neyens, Malika Toubal, Bertrand Nongaillard, V. Thomy

Efficient cleaning of contaminations in the semiconductor industry is a determining factor in ensuring the good quality of the electronics products. We present here the dynamic wetting characterization of a fluid on top of Deep Trench Isolation (DTI) structures using ultra-high frequency acoustic…

15th International Symposium on Ultra Clean Processing of Semiconductor Surfaces, UCPSS 2021, Session 6 - Wet processing in narrow spaces and pattern collapse, Apr 2021, Virtual, Unknown Region. pp.143-149, ⟨10.4028/www.scientific.net/SSP.314.143⟩. ⟨hal-03362264⟩

Communication dans un congrès

Evolution of localized surface plasmon resonance made of gold nanowire chain embedded in WS2multilayers

Z. Oumekloul, Y. Achaoui, A. Mir, Abdellatif Akjouj

Recently, the transition metal dichalcogenides (TMDs) have emerged as a new class of building blocks for engineering enhanced plasmonic sensors. This class of materials can be made with a low production cost and can be easily hybridized with metallic nanoparticles whereby desired molecules are…

4th International Conference on Materials and Environmental Science, ICMES 2020, Nov 2020, Oujda, Morocco. pp.7507-7510, ⟨10.1016/j.matpr.2021.02.259⟩. ⟨hal-03362269⟩

Article dans une revue

Mm-wave through-load element for on-wafer measurement applications

Marc Margalef-Rovira, Olivier Occello, Abdelhalim Saadi, Vanessa Avramovic, Sylvie Lepilliet, Loïc Vincent, Manuel J. Barragan, Emmanuel Pistono, Sylvain Bourdel, Christophe Gaquière, Philippe Ferrari

This paper presents an innovative Through-Load element aimed at characterization applications at mm-wave frequencies. The proposed structure can behave as a Through connection or as a 50-Ω load depending on a DC control voltage. Among other potential applications, this system can be used to…

IEEE Transactions on Circuits and Systems I: Regular Papers, 2021, 68 (8), pp.3170-3183. ⟨10.1109/TCSI.2021.3072097⟩. ⟨hal-03202213⟩

Article dans une revue

New barrier layer design for the fabrication of gallium nitride-metal-insulator-semiconductor-high electron mobility transistor normally-off transistor

Flavien Cozette, Bilal Hassan, Christophe Rodriguez, Eric Frayssinet, Rémi Comyn, François Lecourt, Nicolas Defrance, Nathalie Labat, François Boone, Ali Soltani, Abdelatif Jaouad, Yvon Cordier, Hassan Maher

This paper reports on the fabrication of an enhancement-mode AlGaN/GaN metal-insulator-semiconductor-high electron mobility transistor with a new barrier epi-layer design based on double Al 0.2 Ga 0.8 N barrier layers separated by a thin GaN layer. Normally-off transistors are achieved with good…

Semiconductor Science and Technology, 2021, 36 (3), pp.034002. ⟨10.1088/1361-6641/abd489⟩. ⟨hal-03341284⟩

Communication dans un congrès

[Invited workshop] Nanorobotic On-Wafer Probe Station Under Scanning Electron Microscope

Kamel Haddadi

15th European Microwave Week - Workshop Measurements at mmWave and Terahertz Frequencies of Three Measurement Quantities: S-Parameters, Power, and Complex Permittivity of Dielectric Materials, Jan 2021, Utrecht, Netherlands. ⟨hal-03582098⟩