Publicaciones

• Communication dans un congrès

Characterization of vertical vibration of electrostatically actuated resonators using Atomic Force Microscope in noncontact mode

Vincent Agache, Bernard Legrand, K. Nakamura, H. Kawakatsu, Lionel Buchaillot, Hiroshi Toshiyoshi, Dominique Collard, Hiroyuki Fujita

Non contact mode atomic force microscope (AFM) direct characterization of out-of-plane fixed-fixed high frequency microelectromechanical resonators is examined while applying the excitation voltage to integrated electrostatic transducers. Non contact mode is rather used than contact mode in order...

The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005, Jun 2005, Seoul, South Korea. pp.2023-2026, ⟨10.1109/SENSOR.2005.1497499⟩. ⟨hal-00125631⟩

• Article dans une revue

Modeling and experimental validation of sharpening mechanism based on thermal oxidation for fabrication of ultra-sharp silicon nanotips

Vincent Agache, Roger Ringot, Patrice Bigotte, Vincent Senez, Bernard Legrand, Lionel Buchaillot, Dominique Collard

This paper aims at modeling the thermal oxidation of silicon pillars leading to the formation of very sharp silicon tips. The model is used to determine optimum process parameters with respect to the initial shape of the silicon pillars and the geometry of the desired tip. The modeling concept is...

IEEE Transactions on Nanotechnology, 2005, 4, pp.548-556. ⟨10.1109/TNANO.2005.851386⟩. ⟨hal-00125632⟩

• Communication dans un congrès

Realization of millimeter-wave planar antennas on PDMS

Nicolas Tiercelin, P. Coquet, R. Sauleau, V. Senez, H. Fujita

2005, pp.1994-1997. ⟨hal-00130851⟩

• Autre publication scientifique

Contributions à la modélisation et à la fabrication de dispositifs silicium avancée

Emmanuel Dubois

2005. ⟨hal-00138412⟩

• Article dans une revue

Comparison of in-plane actuation from a thin film and a bulk actuators

E. Fribourg-Blanc, M. Dupont, D. Osmont, Eric Cattan, Denis Remiens

Integrated Ferroelectrics, 2005, 69, pp.119-126. ⟨hal-00138420⟩

• Article dans une revue

Ferroelectric active sensors

L. Cima, Denis Remiens

Sensors and Actuators A: Physical , 2005, 119, pp.120-127. ⟨hal-00138417⟩

• Communication dans un congrès

Comparison of in-plane actuation from a thin film and a bulk actuators

E. Fribourg-Blanc, M. Dupont, D. Osmont, Eric Cattan, Denis Remiens

2005, pp.119-126. ⟨hal-00138427⟩

• Article dans une revue

Pyroelectric characterization of hysteresis phenomena asymmetry in PZT film on silicon structures

S. Bravina, N. Morozovsky, Eric Cattan, Denis Remiens, G.S. Wang

Integrated Ferroelectrics, 2005, 73, pp.27-35. ⟨hal-00138426⟩

• Autre publication scientifique

Modélisation et conception de résonateurs accordables à onde de volume pour les filtres RF

G. Caruyer

2005. ⟨hal-00138588⟩

• Communication dans un congrès

Determination of the uncertainties introduced when modeling a realistic automotive electronic sub-system

S. Egot, M. Klingler, L. Kone, S. Baranowski, F. Lafon, C. Leullieux, C. Marot

Proceedings of 2EMC Symposium on Embedded EMC, 2005, Rouen, France. ⟨hal-00140790⟩