Publicaciones

• Article dans une revue

Characterization of phosphorus and boron heavily doped LPCVD polysilicon films in the temperature range 293-373K

Mohamed Boutchich, Katir Ziouche, Pascale Godts, Didier Leclercq

In this paper, thermal properties of phosphorus and boron-doped low pressure chemical vapor deposition (LPCVD) polysilicon layers with regard to sensor applications are presented. Thermoelectric coefficient and relative resistance variations of polysilicon are investigated within the temperature...

IEEE Electron Device Letters, 2002, 23 (3), pp.139-141. ⟨10.1109/55.988817⟩. ⟨hal-00148729⟩

• Article dans une revue

Vacuum and cryogenic station for Micro-Electro-Mechanical Systems probing and testing

Bernard Legrand, E. Quévy, B. Stefanelli, D. Collard, L. Buchaillot

Review of Scientific Instruments, 2002, 73, pp.4393-4395. ⟨hal-00148782⟩

• Communication dans un congrès

Reliability of packaging MEMS in shock environment : crack and stiction modeling

O. Millet, D. Collard, L. Buchaillot

2002, pp.696-703. ⟨hal-00148789⟩

• Communication dans un congrès

Diffusion d'un élement V à partir d'une surface d'un semiconducteur III-V, influence de la reconstruction et de la morphologie

C. Priester

Journées Surfaces et Interfaces, JSI 2002, 2002, Toulouse, France. ⟨hal-00149684⟩

• Communication dans un congrès

Grazing incidence diffraction anomalous fine structure of self-assembled semiconductor nanostructures

S. Grenier, A. Letoublon, M.G. Proietti, Hubert Renevier, L. Gonzalez, J.M. Garcia, C. Priester, J. Garcia

2002, pp.24-33. ⟨hal-00149685⟩

• Article dans une revue

Thermally assisted formation of silicon islands on a silicon-on-insulator substrate

Bernard Legrand, Vincent Agache, Jean-Philippe Nys, Thierry Melin, Vincent Senez, Didier Stiévenard

We report the self-formation of nanometer-size silicon islands on a silicon-on-insulator (SOI) substrate that is associated with simple thermal treatment in the range of 500–900 °C. We study the island formation process versus the temperature of the thermal annealing, the thickness of the top...

Journal of Applied Physics, 2002, 91, pp.106-111. ⟨10.1063/1.1420761⟩. ⟨hal-00149668⟩

• Communication dans un congrès

Fabrication and characterization of laterally coupled lasers

S. Mc Murtry, Jean-Pierre Vilcot, F. Mollot, Didier Decoster

2002, pp.367-374. ⟨hal-00149638⟩

• Communication dans un congrès

Caractérisation diélectrique en réflexion transmission de cristaux liquides en structure ligne plaquée

Abdellatif Akjouj, Bahram Djafari-Rouhani, Jerome O. Vasseur, Jean-François Legier, Erick Paleczny, Mohamed Bouazaoui, Jean-Pierre Vilcot, Arnaud Beaurain, Stefan Mc Murtry, L. Dobrzynski

Actes des 7èmes Journées de Caractérisation Microondes et Matériaux, JCMM 2002, 2002, Toulouse, France. ⟨hal-00149649⟩

• Autre publication scientifique

Du modèle de canal de propagation à l'optimisation des systèmes de télécommunications

M. Lienard

2002. ⟨hal-00577049⟩

• Communication dans un congrès

High-frequency high-Q micro-mechanical resonators in thick epipoly technology with post-process gap adjustment

D. Galayko, A. Kaiser, Bernard Legrand, C. Combi, D. Collard, L. Buchaillot

2002, pp.665-668. ⟨hal-00148737⟩