Publicaciones

• Article dans une revue

A modified bosch-type process for precise surface micromachining of polysilicon

E. Quevy, B. Parvais, J.P. Raskin, L. Buchaillot, D. Flandre, D. Collard

Journal of Micromechanics and Microengineering, 2002, 12, pp.328-333. ⟨hal-00148763⟩

• Article dans une revue

Characterisation of micromachining processes during KrF excimer laser ablation of TiNi shape memory alloy thin sheets and films

S.T. Davies, E.C. Havey, H. Jin, J.P. Hayes, M.K. Ghantasala, I. Roch, L. Buchaillot

Smart Materials and Structures, 2002, 11, pp.708-714. ⟨hal-00148762⟩

• Article dans une revue

Adhesive forces investigation on a silicon tip by contact mode atomic force microscope

Vincent Agache, Bernard Legrand, Dominique Collard, Lionel Buchaillot

An atomic force microscope operating in contact mode is used in this letter for probing the adhesive forces at the apex of a silicon nanotip with typical radius smaller than 15 nm, fabricated using a combination of high-resolution electron beam lithography and plasma dry etching. The amplitude of...

Applied Physics Letters, 2002, 81, pp.2623-2625. ⟨10.1063/1.1508806⟩. ⟨hal-00148768⟩

• Communication dans un congrès

Room temperature passivation of the silicon surface by chemisorption of an organic monolayer

S. Kar, D. Vuillaume

202nd ElectroChemical Society Meeting, 2002, Salt Lake City, UT, United States. ⟨hal-00148726⟩

• Communication dans un congrès

Performance of DS-CDMA on the 60 GHz channel

Laurent Clavier, M. Fryziel, Christelle Garnier, Yves Delignon, David Boulinguez

The goal of the paper is to show that a Gaussian approximation can be used to model the global noise in a DS-CDMA system on a 60 GHz frequency band. We show that this approximation can also include the noise due to multipath and to imperfections in power control. The model can then be used as a...

The 13th IEEE International Symposium on Personal, Indoor and Mobile Radio Communications, Sep 2002, Lisbon, Portugal. pp.2332-2336, ⟨10.1109/PIMRC.2002.1046561⟩. ⟨hal-00148328⟩

• Communication dans un congrès

A new empirical non-linear model for SOI MOSFET

A. Siligaris, M. Vanmackelberg, Gilles Dambrine, N. Vellas, Francois Danneville

2002, pp.101-104. ⟨hal-00147833⟩

• Article dans une revue

Path loss model of the 60 GHz indoor radio channel

M. Fryziel, Christophe Loyez, Laurent Clavier, N. Rolland, P. Rolland

Microwave and Optical Technology Letters, 2002, 34, pp.158-162. ⟨hal-00147879⟩

• Article dans une revue

Influence of the microstructure and of an ION beam etching on the domain propagation in PZT thin films

Brice Gautier, Caroline Soyer, Eric Cattan, Denis Remiens, Jean-Claude Labrune

PbZrTiO 3 (PZT) thin films have been grown by RF-magnetron sputtering and sputter etched by Argon ion beam. The topography of the bombarded material is studied by Atomic Force Microscope (AFM), several ferroelectric domains are created by applying a sufficiently high voltage between the tip of the...

Integrated Ferroelectrics, 2002, 50 (1), pp.231-240. ⟨10.1080/10584580215530⟩. ⟨hal-00149627⟩

• Article dans une revue

Reactive ion beam etching effects on maskless PZT properties

Caroline Soyer, Eric Cattan, Denis Remiens

Ion beam etching of sputtered Pb(Zr 0.54 ,Ti 0.46 )O 3 has been performed using pure Ar gas. The etch rate and selectivity ratios between PZT and masks as a function of the process parameters (current density, acceleration voltage, gas pressure) has been investigated. We have evaluated the PZT...

Integrated Ferroelectrics, 2002, 48, pp.221-229. ⟨10.1080/10584580215465⟩. ⟨hal-00149624⟩

• Article dans une revue

Characterization of mems devices using a polarisation interferometer

D. Jenkins, W. Clegg, X. Liu, E. Fribourg-Blanc, Eric Cattan

Integrated Ferroelectrics, 2002, 50, pp.91-99. ⟨hal-00149626⟩