Publications

• Article dans une revue

Packaging methodology for RF devices using a BCB membrane transfert technique

S. Seok, N. Rolland, P.A. Rolland

Journal of Micromechanics and Microengineering, 2006, 16, pp.2384-2388. ⟨hal-00126798⟩

• Article dans une revue

An optimal high contrast e-beam lithography process for the patterning of dense fin networks

F. Fruleux, J. Penaud, Emmanuel Dubois, M. Francois, M. Muller

There are many difficulties to overcome towards the integration of 10 nm CMOS technology. One such major challenge is to keep a tight control of the leakage current of devices while increasing the current drive at a reduced supply voltage. In this context, multi-gated structures, which are used to…

Materials Science and Engineering: C, 2006, 26 (5-7), pp.893-897. ⟨10.1016/j.msec.2005.09.017⟩. ⟨hal-00138653⟩

• Article dans une revue

Transformation of hydrogen silsesquioxane properties with RIE plasma treatment for advanced multiple-gate MOSFETs

J. Penaud, F. Fruleux, Emmanuel Dubois

Keeping in line with Moore's law requires increasing efforts in the development of alternative electronic devices. Multiple-gate transistors are very promising in order to suppress short-channel effects and to increase the current drive. Nevertheless, the fabrication of such devices represents…

Applied Surface Science, 2006, 253 (1), pp.395-399. ⟨10.1016/j.apsusc.2006.06.021⟩. ⟨hal-00138654⟩

• Article dans une revue

Investigation of traps in AlGaN/GaN HEMTs by current transient spectroscopy

M. Gassoumi, J.M. Bluet, F. Chekir, I. Dermoul, H. Maaref, G. Guillot, A. Minko, Virginie Hoel, Christophe Gaquière

Materials Science and Engineering: C, 2006, 26, pp.SI : 383-386. ⟨hal-00154931⟩

• Article dans une revue

Tunable BST capacitor loss compensation using active circuit

Mahmoud Al Ahmad, Nathalie Rolland, Paul-Alain Rolland

The compensation of the ohmic and the material dielectric losses in a barium strontium titanate (BST) capacitor using an active circuit is reported in this letter. The negative resistance (NR) circuit creates an effective conductance of -|G n | which adds to the positive conductance of the passive…

IEEE Microwave and Wireless Components Letters, 2006, 16, pp.549-551. ⟨hal-00154924⟩

• Communication dans un congrès

A new BCB film zero-level packaging for RF devices

S. Seok, N. Rolland, P.A. Rolland

2006, pp.1118-1121. ⟨hal-00147516⟩

• Communication dans un congrès

Weak NLOS channel sounding

Michael Bocquet, Christophe Loyez, A. Benlarbi-Delaï

2006, pp.707-710. ⟨hal-00147513⟩

• Communication dans un congrès

High quality factors of silicon membranes with piezoelectric actuation and detection scheme for biosensing purpose in liquid media

Cédric Ayela, Thierry Leichle, C. Bergaud, Liviu Nicu, Eric Cattan, Caroline Soyer, M. Pugniere

2006, 6 pp. ⟨hal-00147730⟩

• Communication dans un congrès

Etude de structures du type couche sur substrat par laser ultrasons

M. Lemaire, Frédéric Jenot, Mohammadi Ouaftouh, Marc Duquennoy, Mohamed Ourak

Journées Ultrasons Laser, 2006, Le Mans, France. ⟨hal-00147743⟩

• Communication dans un congrès

Nanopatterning of InP(001) surface using e-beam lithography to localize InAs quantum dots for single photon source application

A. Turala, P. Rojo-Romeo, P. Regreny, M. Gendry, C. Priester

2006, 2 pp. ⟨hal-00152961⟩