Publications

• COMM

Passive guided wave tomography for corrosion detection

Tom Druet, Bastien Chapuis, Emmanuel Moulin

Structural health monitoring (SHM) consists in embedding sensors in a structure in order to monitor its health status throughout its lifetime. The implementation of SHM systems is restricted in many situations by the necessity to store or to harvest the electric energy necessary to emit the waves…

EWSHM 2016 - 8th European Workshop on Structural Health Monitoring, Jul 2016, Bilbao, Spain. pp.1182-1189. ⟨cea-01843180⟩

• COMM

Spatial resolution enhancement of near field microwave microscope

S. Gu, Tianjun Lin, T. Lasri

A near-field scanning microwave microscope based on an interferometric technique is proposed in this work. To ensure an optimal spatial resolution, crucial parameters of the evanescent microwave probe are finely studied including the tip apex, the stand-off distance and the scanning step size. ©…

46th European Microwave Conference, EuMC 2016, Oct 2016, London, United Kingdom. pp.544-547, ⟨10.1109/EuMC.2016.7824400⟩. ⟨hal-03538364⟩

• ART

Structural and optical properties of RF-biased PECVD TiO2 thin films deposited in an O2/TTIP helicon reactor

D. Li, A. Goullet, Michèle Carette, A. Granier, Y. Zhang, Jean-Pierre Landesman

TiO2 thin films are deposited from oxygen/titanium tetraisopropoxide inductively coupled radiofrequency plasmas at low temperature and pressure by a RF-biased PECVD technique. In such a process, the substrate biasing effect (Vb) on the related film composition, structure, morphology, and optical…

Vacuum, 2016, 131, pp.231-239. ⟨10.1016/j.vacuum.2016.07.004⟩. ⟨hal-01372799⟩

• OTHER

Advances in Historical Studies [Editor in Chief 5/4]

Raffaele Pisano

2016. ⟨hal-04511018⟩

• OUV

Tartaglia’s Science of Weights and Mechanics in the Sixteenth Century. Selections from Quesiti et inventioni diverse: Books VII–VIII

Raffaele Pisano, Danilo Capecchi

Springer, 2016, 978-94-017-9709-2. ⟨hal-04515861⟩

• ART

SAW synthesis with IDTs array and the inverse filter: toward a versatile SAW toolbox for microfluidics and biological applications

Antoine Riaud, Michael Baudoin, Jean-Louis Thomas, Olivier Bou Matar

Surface acoustic waves (SAWs) are versatile tools to manipulate fluids at small scales for microfluidics and biological applications. A non-exhaustive list of operations that can be performed with SAW includes sessile droplet displacement, atomization, division and merging but also the actuation of…

IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control, 2016, 63 (10), pp.1601 - 1607. ⟨10.1109/TUFFC.2016.2558583⟩. ⟨hal-01314669⟩

• ART

Increased resistance to detachment of adherent microspheres and Bacillus spores subjected to a drying step

Christine Faille, Ilyesse Bihi, Annette Ronse, Gilles Ronse, Michael Baudoin, Farzam Zoueshtiagh

In various environments, including that of food processing, adherent bacteria are often subjected to drying conditions. These conditions have been shown to result in changes in the ability of biofilms to cross-contaminate food in contact with them. In this study, we investigated the consequences of…

Colloids and Surfaces B: Biointerfaces, 2016, 143, pp.293-300. ⟨10.1016/j.colsurfb.2016.03.041⟩. ⟨hal-02635685⟩

• ART

Piezoelectric MEMS resonators based on ultrathin epitaxial GaN heterostructures on Si

P Leclaire, E Frayssinet, C Morelle, Y Cordier, Didier Theron, Marc Faucher

We present the first results about microelectromechanical (MEMS) resonators fabricated on epitaxial nitride semiconductors with thin buffers engineered for MEMS and NEMS applications. These results assess the use of thin buffers for GaN MEMS fabrication. On a 700 nm thick AlGaN/GaN epilayer, a high…

Journal of Micromechanics and Microengineering, 2016, 26 (10), pp.105015. ⟨10.1088/0960-1317/26/10/105015⟩. ⟨hal-03752321⟩

• ART

Modeling of Fermi-level pinning alleviation with MIS contacts: n and pMOSFETs cointegration considerations-Part I

Julien Borrel, Louis Hutin, Olivier Rozeau, Marie-Anne Jaud, Sebastien Martinie, Magali Gregoire, Emmanuel Dubois, Maud Vinet

Aiming at overcoming the Fermi-level pinning (FLP) occurring at the metal/semiconductor interfaces, metal/insulator/semiconductor (MIS) contacts to n-Si and p-Si are usually treated in separate optimization studies, yet with no particular insight on their technological compatibility. In this paper…

IEEE Transactions on Electron Devices, 2016, 63 (9), pp.3413-3418. ⟨10.1109/TED.2016.2590836⟩. ⟨hal-03325007⟩

• COMM

Deep Trench Isolation and Through Silicon Via Wetting Characterization by High-Frequency Acoustic Reflectometry

Christophe Virgilio, Lucile Broussous, Philippe Garnier, Julien Carlier, Pierre Campistron, V. Thomy, Malika Toubal, Pascal Besson, Laurence Gabette, Bertrand Nongaillard

Wetting efficiency of microstructures or nanostructures patterned on Si wafers is a real concern in integrated circuits manufacturing. We present here a high-frequency acoustic method which enables the local determination of the wetting state of a liquid on real DTI and TSV structures. Partial…

13th International Symposium on Ultra Clean Processing of Semiconductor Surfaces (UCPSS), Sep 2016, Knokke, Belgium. ⟨10.4028/www.scientific.net/SSP.255.129⟩. ⟨hal-03280231⟩