Publications

Affichage de 5891 à 5900 sur 16059


  • COMM

Deep Trench Isolation and Through Silicon Via Wetting Characterization by High-Frequency Acoustic Reflectometry

Christophe Virgilio, Lucile Broussous, Philippe Garnier, Julien Carlier, Pierre Campistron, V. Thomy, Malika Toubal, Pascal Besson, Laurence Gabette, Bertrand Nongaillard

Wetting efficiency of microstructures or nanostructures patterned on Si wafers is a real concern in integrated circuits manufacturing. We present here a high-frequency acoustic method which enables the local determination of the wetting state of a liquid on real DTI and TSV structures. Partial…

13th International Symposium on Ultra Clean Processing of Semiconductor Surfaces (UCPSS), Sep 2016, Knokke, Belgium. ⟨10.4028/www.scientific.net/SSP.255.129⟩. ⟨hal-03280231⟩

  • ART

Transport properties of multigrained nanocomposites with imperfect interfaces

Pier Luca Palla, Stefano Giordano

Journal of Applied Physics, 2016, 120 (18), 184301, 9 p. ⟨10.1063/1.4967316⟩. ⟨hal-03407507⟩

  • ART

BRANCHED POLYESTERS FROM GERMYLATED AND FATTY COMPOUNDS

Nadia Katir, Daniela Andrade, Mohamed Dahrouch, Enzo Díaz, Nicolas Gatica, D. Hourlier, Nazmy Reyes, Miguel Zarraga

Journal of the Chilean Chemical Society, 2016, 61 (1), pp.2784-2787. ⟨10.4067/S0717-97072016000100008⟩. ⟨hal-02396330⟩