Publications

• Article dans une revue

Coupled-resonator micromechanical filters with voltage tuneable bandpass characteristic in thick-film polysilicon technology

Dimitri Galayko, Andreas Kaiser, Bernard Legrand, Lionel Buchaillot, Dominique Collard, Chantal Combi

This paper reports on the design and characterization of 2.4 and 9.2 MHz fourth and sixth order passband microelectromechanical coupled-resonator filters implemented in a 15 μm thick-film epitaxial polysilicon technology. The work uses a novel approach in the building of coupled-resonator…

Sensors and Actuators A: Physical , 2006, 126 (1), pp.227-240. ⟨10.1016/j.sna.2005.10.033⟩. ⟨hal-01195973⟩

• Article dans une revue

TEM study of iridium silicide contact layers for low Schottky barrier MOSFETs

A. Laszcz, A. Czerwinski, J. Ratajczak, J. Katcki, N. Breil, G. Larrieu, Emmanuel Dubois

An influence of annealing temperatures (300, 400 and 500°C) on the iridium silicide formation in the Ir/Si structure was analysed by means of the transmission electron microscopy (TEM). The silicide layer is formed by the solid-state reaction b etween 15 nm thick Ir metallisation and a Si layer…

Archives of Metallurgy and Materials, 2006, 51 (4), pp.551-554. ⟨hal-00152968⟩

• Article dans une revue

Design of textile heat flowmeter combining evaporation phenomena

Didier Dupont, P. Godts, D. Leclercq

Textile Research Journal, 2006, 76, pp.772-776. ⟨10.1177/0040517507068288⟩. ⟨hal-00244018⟩

• Communication dans un congrès

New technology for high throughput BioMEMS

Vianney Mille, Nour Eddine Bourzgui, Bertrand Bocquet

Actes du Congrès Français de Microfluidique, 2006, Toulouse, France. ⟨hal-00244019⟩

• Article dans une revue

New concept of RF functions by microfluidic coupling

L. Le Cloirec, A. Benlarbi-Delaï, Bertrand Bocquet

We present a new concept that combines microfluidic circuits designed inside planar waveguides for advanced ultra-wide band functions. Feasibility of such approach is demonstrated on a broadband variable delay line operating in the microwave region. We also show that this approach is very well…

Microwave and Optical Technology Letters, 2006, 48 (10), pp.1912-1916. ⟨10.1002/mop.21812⟩. ⟨hal-00243996⟩

• Communication dans un congrès

Full wave analysis and electrical modeling of eight copper interconnects placed in a giga-scale integrated environment for signal integrity evaluation

Freddy Ponchel, Jean-François Legier, Erick Paleczny, Christophe Seguinot, Denis Deschacht

2006, 6 pp. ⟨hal-00162816⟩

• Communication dans un congrès

The role of multicomponent surface diffusion in growth and doping of silicon nanowires

A.A. Efremov, A. Klimovskaya, D. Hourlier

European Material Research Society Spring Meeting, E-MRS - IUMRS - ICEM 06, 2006, Nice, France. ⟨hal-00243972⟩

• Communication dans un congrès

1/f tunnel current noise through Si-bound alkyl monolayers

Nicolas Clément, Stéphane Pleutin, Oliver Seitz, S. Lenfant, D. Cahen, Dominique Vuillaume

Third Meeting on Molecular Electronics, ElecMol'06, Dec 2006, Grenoble, France. ⟨hal-00163254⟩

• Communication dans un congrès

Victim and aggressor line electrical modelisation in an multicoupled interconnect environment for transient simulation

Freddy Ponchel, Jean-François Legier, Erick Paleczny, Christophe Seguinot, Denis Deschacht

2006, pp.249-251. ⟨hal-00162815⟩

• Communication dans un congrès

Thermodynamic study of silicon nanowire growth mechanisms

D. Hourlier, P. Perrot

Matériaux 2006, 2006, Dijon, France. ⟨hal-00243978⟩