Publications

• Article dans une revue

Wetting characterization of high aspect ratio nanostructures by gigahertz acoustic reflectometry

Christophe Virgilio, Julien Carlier, Pierre Campistron, Malika Toubal, Philippe Garnier, L. Broussous, V. Thomy, Bertrand Nongaillard

Wetting efficiency of microstructures or nanostructures patterned on Si wafers is a real challenge in integrated circuits manufacturing. In fact, bad or non-uniform wetting during wet processes limits chemical reactions and can lead to non-complete etching or cleaning inside the patterns and device…

International Journal of Mechanical and Mechatronics Engineering, 2016, 10 (3), pp.413-418. ⟨hal-03560404⟩

• Communication dans un congrès

Metal/insulator/semiconductor contacts for ultimately scaled CMOS nodes: projected benefits and remaining challenges

Julien Borrel, Louis Hutin, Helen Grampeix, Emmanuel Nolot, Magali Tessaire, Guillaume Rodriguez, Yves Morand, Fabrice Nemouchi, Magali Gregoire, Emmanuel Dubois, Maud Vinet

In this paper, some key fundamental aspects of Metal / Insulator / Semiconductor contacts as well as practical issues occurring with their implementation are reviewed in order to fully comprehend the opportunities and limitations of this approach.

IWJT 2016 - 16th International Workshop on Junction Technology, May 2016, Shanghai, China. pp.14-19. ⟨hal-03325000⟩

• Communication dans un congrès

New Optical Approach of SAW Delay Line Characterization

Lyes Djoumi, Nikolay Smagin, Meddy Vanotti, Dame Fall, Etienne Herth, Marc Duquennoy, Mohammadi Ouaftouh, Virginie Blondeau-Patissier, Frédéric Jenot

Surface acoustic wave devices are usually characterized solely through their electrical parameters. Mechanical displacements can also be numerically computed using finite element software. In this paper, we show that this characterization can be supplemented using an interferometer system capable…

30th Eurosensors Conference, EUROSENSORS XXX, Sep 2016, Budapest, Hungary. pp.838-843. ⟨hal-03586205⟩

• Article dans une revue

Experimental Study and Device Design of NO, NO2, and NH3 Gas Detection for a Wide Dynamic and Large Temperature Range Using Pt/AlGaN/GaN HEMT

Chris Bishop, Yacine Halfaya, Ali Soltani, Suresh Sundaram, Xin Li, Jérémy Streque, Youssef El Gmili, Paul B Voss, Jean-Paul Salvestrini, Abdallah Ougazzaden

We report an AlGaN/GaN HEMT gas sensor designed to enable NO, NO2, and NH3 detection from 100°C-400°C over a large concentration range. Device modeling is performed to optimize several HEMT device parameters for sensing, and the experimental results show that the optimized sensor has improved…

IEEE Sensors Journal, 2016, 16 (18), pp.6828-6838. ⟨10.1109/JSEN.2016.2593050⟩. ⟨hal-02385234⟩

• Article dans une revue

On-chip and freestanding elastic carbon films for micro-supercapacitors

Peihua Huang, Christophe Lethien, Sébastien Pinaud, Kevin Brousse, Raphaël Laloo, Viviane Turq, Marc Respaud, Arnaud Demortiere, Barbara Daffos, Pierre-Louis Taberna, Bruno Chaudret, Yury Gogotsi, Patrice Simon

Integration of electrochemical capacitors with silicon-based electronics is a major challenge, limiting energy storage on a chip. We describe a wafer-scale process for manufacturing strongly adhering carbide-derived carbon films and interdigitated micro-supercapacitors with embedded titanium…

Science, 2016, 351 (6274), pp.691-695. ⟨10.1126/science.aad3345⟩. ⟨hal-01489186⟩

• Article dans une revue

Enhancing V2X communication based on a new comb-pilot estimation approach

Ahlem Sassi, Yassin El Hillali, Atika Rivenq, F. Charfi, L. Kamoun

International Journal of Vehicular Technology, 2016, 14 p. ⟨hal-03682444⟩

• Autre publication scientifique

Advances in Historical Studies [Editor in Chief 5/4]

Raffaele Pisano

2016. ⟨hal-04511018⟩

• Article dans une revue

SAW synthesis with IDTs array and the inverse filter: toward a versatile SAW toolbox for microfluidics and biological applications

Antoine Riaud, Michael Baudoin, Jean-Louis Thomas, Olivier Bou Matar

Surface acoustic waves (SAWs) are versatile tools to manipulate fluids at small scales for microfluidics and biological applications. A non-exhaustive list of operations that can be performed with SAW includes sessile droplet displacement, atomization, division and merging but also the actuation of…

IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control, 2016, 63 (10), pp.1601 - 1607. ⟨10.1109/TUFFC.2016.2558583⟩. ⟨hal-01314669⟩

• Article dans une revue

Modeling of Fermi-level pinning alleviation with MIS contacts: n and pMOSFETs cointegration considerations-Part I

Julien Borrel, Louis Hutin, Olivier Rozeau, Marie-Anne Jaud, Sebastien Martinie, Magali Gregoire, Emmanuel Dubois, Maud Vinet

Aiming at overcoming the Fermi-level pinning (FLP) occurring at the metal/semiconductor interfaces, metal/insulator/semiconductor (MIS) contacts to n-Si and p-Si are usually treated in separate optimization studies, yet with no particular insight on their technological compatibility. In this paper…

IEEE Transactions on Electron Devices, 2016, 63 (9), pp.3413-3418. ⟨10.1109/TED.2016.2590836⟩. ⟨hal-03325007⟩

• Article dans une revue

Plasmonic photothermal cancer therapy with gold nanorods/reduced graphene oxide core/shell nanocomposites

Kostiantyn Turcheniuk, Tetiana Dumych, Rostyslav Bilyy, Volodymyr Turcheniuk, Julie Bouckaert, Volodymyr Vovk, Valentyna Chopyak, Vladimir Zaitsev, Pascal Mariot, Natasha Prevarskaya, Rabah Boukherroub, Sabine Szunerits

Gold nanorods (Au NRs) are known for their efficient conversion of photon energy into heat, resulting in hyperthermia and suppression of tumor growth in vitro and in vivo. Au NRs are thus of great promise for photothermal therapy (PTT) of different cancers. From the point of cancer therapy, low…

RSC Advances, 2016, 6 (2), pp.1600-1610. ⟨10.1039/C5RA24662H⟩. ⟨hal-01693288⟩