Publications

• Article dans une revue

A micro-electro-mechanical accelerometer based on gallium nitride on silicon

C. Morelle, D. Théron, I. Roch-Jeune, Pascal Tilmant, Etienne Okada, F. Vaurette, Bertrand Grimbert, Joff Derluyn, Stefan Degroote, Marianne Germain, M. Faucher

We report on an accelerometer micro-sensor based on epitaxial gallium nitride and silicon. The device is a vibrating beam accelerometer fabricated with a micro-electro-mechanical-system technology starting from an AlGaN/GaN heterostructure grown on silicon. The vibrating GaN beam has integrated…

Applied Physics Letters, 2023, 122 (3), pp.033502. ⟨10.1063/5.0127987⟩. ⟨hal-03945292⟩

• Chapitre d'ouvrage

Generalizations

Leonard Dobrzynski, Housni Al Wahsh, Abdellatif Akjouj

Resonance, Elsevier, pp.205-211, 2023, ⟨10.1016/B978-0-44-319144-2.00017-8⟩. ⟨hal-04070656⟩

• Article dans une revue

Microwave Optomechanically Induced Transparency and Absorption Between 250 and 450 mK

Sumit Kumar, Dylan Cattiaux, Eddy Collin, Andrew Fefferman, Xin Zhou

High-quality microwave amplifiers and notch-filters can be made from microwave optomechanical systems in which a mechanical resonator is coupled to a microwave cavity by radiation pressure. These amplifiers and filters rely on optomechanically induced transparency (OMIT) and absorption (OMIA),…

Journal of Low Temperature Physics, 2023, 210, pp.562-572. ⟨10.1007/s10909-022-02671-6⟩. ⟨hal-03554556⟩

• Article dans une revue

Highly stable fluorine-free slippery liquid infused surfaces

Anne-Sophie Vaillard, Manon Saget, Flavie Braud, Marc Lippert, Laurent Keirsbulck, Maude Jimenez, Yannick Coffinier, Vincent Thomy

A promising Slippery Liquid Infused Surface (SLIS) has been developed, that is both easy-to-produce and environmentally friendly. Using a double replication method, a 200 µm-thick texturized cross-linked PDMS film was obtained, leading to a grid of micrometric hills and deep wells. A comparison…

Surfaces and Interfaces, 2023, 42, Part A, pp.103296. ⟨10.1016/j.surfin.2023.103296⟩. ⟨hal-04215387⟩

• Communication dans un congrès

Light and Efficient Authentication Mechanism for Connected Vehicles Using Unsupervised Detection

Ramzi Boutahala, Hacène Fouchal, Marwane Ayaida, Shiwen Mao

IEEE International Conference on Communications (ICC), 2023, Rome, Italy. pp.329-333, ⟨10.1109/ICC45041.2023.10279812⟩. ⟨hal-04297399⟩

• Pré-publication, Document de travail

A vision transformer-based framework for knowledge transfer from multi-modal to mono-modal lymphoma subtyping models, Un framework basé sur le vision transformer pour le transfert de connaissance multi-modal vers mono-modal de modèles de sous-typage de lymphome.

Bilel Guetarni, Feryal Windal, Halim Benhabiles, Marianne Petit, Romain Dubois, Emmanuelle Leteurtre, Dominique Collard

Determining lymphoma subtypes is a crucial step for better patient treatment targeting to potentially increase their survival chances. In this context, the existing gold standard diagnosis method, which relies on gene expression technology, is highly expensive and time-consuming, making it less…

2024. ⟨hal-04456283⟩

• Article dans une revue

Homo-epitaxial growth of LiNbO3 thin films by Pulsed Laser deposition

Laura Sauze, Nicolas Vaxelaire, Roselyne Templier, Denis Rouchon, François Pierre, Cyril Guedj, Denis Remiens, Guillaume Rodriguez, Marie Bousquet, Florian Dupont

With the deployment of the 5th Generation of mobile applications (5G), the performances of radio-frequency (RF) filters are pushed to their limits. Highly crystalline piezoelectric materials with an electromechanical coupling coefficient higher than aluminium nitride are of high interest. Lithium…

Journal of Crystal Growth, 2023, 601, pp.126950. ⟨10.1016/j.jcrysgro.2022.126950⟩. ⟨hal-03862259⟩

• Communication dans un congrès

[Invited] Propagation of Elastic Waves in Randomly Distributed Pillars on Metamaterial Phononic Plate

Y. Pennec, L. Carpentier, R. Cai, Y. Jin, A. Noual, B. Djafari-Rouhani, T. Deletang, B. Bonello

PHONONICS 2023: 6th International Conference on Phononic Crystals/Metamaterials/Metasurfaces, Phonon Transport, and Topological Phononics, Jun 2023, Manchester (UK), United Kingdom. ⟨hal-04374333⟩

• Article dans une revue

One-channel time reversal focusing of ultra-high frequency acoustic waves on a MEMS

Hatem Dahmani, Nikolay Smagin, P. Campistron, J. Carlier, Malika Toubal, Bertrand Nongaillard

This Letter reports on a work performed to fabricate and characterize a silicon micro-machined cavity dedicated to micro-resolution Ultra-High Frequency imaging in microfluidics and microbiological applications using one-channel time reversal. Time reversal provides the means to spatially and…

Applied Physics Letters, 2023, 122 (10), pp.102201. ⟨10.1063/5.0142179⟩. ⟨hal-04215309⟩

• Article dans une revue

Fabrication of silicon nitride membrane nanoelectromechanical resonator

Hao Xu, Srisaran Venkatachalam, Christophe Boyaval, Pascal Tilmant, Francois Vaurette, Yves Deblock, Didier Theron, Xin Zhou

In this work, we present details of the nanofabrication process for achieving a silicon nitride nanoelectromechanical resonator, consisting of a membrane covered with a thin aluminium layer capacitively coupled to a suspended top gate. Critical nanofabrication steps have been discussed, including…

Microelectronic Engineering, 2023, 280, pp.112064. ⟨10.1016/j.mee.2023.112064⟩. ⟨hal-04172152⟩