Publications

• Communication dans un congrès

New technology for high throughput THz BioMEMS

Vianney Mille, Nour Eddine Bourzgui, Céline Vivien, Philippe Supiot, Bertrand Bocquet

We propose a new technology for high throughput bioMEMS based on a mixed technology polymer on silicon. This technology is compatible with microelectronic processes, the electromagnetic propagation, the microfluidic circulation and the biological solutions. We use a new process and a new polymer…

28th Annual International Conference of the IEEE Engineering in Medicine and Biology Society, EMBS'06, Aug 2006, New York, NY, United States. pp.3505-3508, ⟨10.1109/IEMBS.2006.260289⟩. ⟨hal-00243997⟩

• Communication dans un congrès

Nanofils de Si et sonde atomique tomographique

J. Houard, R. Lardé, E. Cadel, P. Pareige, D. Hourlier, D. Stiévenard

Journées du GDR Nanofils Nanotubes Semiconducteurs, 2006, Villeneuve d'Ascq, France. ⟨hal-00243974⟩

• Article dans une revue

Lamb wave propagation in a plate with a grooved surface with several spatial periodicities

D. Leduc, B. Morvan, Anne-Christine Hladky, P. Pareige, J.L. Izbicki

Ultrasonics, 2006, 44, pp.1359-1363. ⟨hal-00147506⟩

• Communication dans un congrès

Création d'un capteur d'allongement souple, compatible textile

C. Cochrane, C. Dufour, V. Koncar

Hainova® Micro Nano - « Des Nanos pour Grandir », 2006, Charleroi, Belgique. ⟨hal-00244001⟩

• Communication dans un congrès

Création d'un capteur d'allongement souple, compatible textile

C. Cochrane, V. Koncar, C. Dufour

Matériaux 2006, 2006, Dijon, France. ⟨hal-00244000⟩

• Communication dans un congrès

Nano composite material sensors for textiles

C. Cochrane, V. Koncar, C. Dufour

6th World Textile Conference, AUTEX 2006, 2006, Raleigh, NC, United States. ⟨hal-00243998⟩

• Communication dans un congrès

Simulation Monte Carlo de lasers à cascade quantique incluant le couplage électron-photon

Jean-Luc Thobel, Olivier Bonno, François Dessenne

Journées couplées GDR-E Térahertz 2897 et GDR Ondes 2451, 2006, Montpellier, France. ⟨hal-00247425⟩

• Article dans une revue

An optimal high contrast e-beam lithography process for the patterning of dense fin networks

F. Fruleux, J. Penaud, Emmanuel Dubois, M. Francois, M. Muller

There are many difficulties to overcome towards the integration of 10 nm CMOS technology. One such major challenge is to keep a tight control of the leakage current of devices while increasing the current drive at a reduced supply voltage. In this context, multi-gated structures, which are used to…

Materials Science and Engineering: C, 2006, 26 (5-7), pp.893-897. ⟨10.1016/j.msec.2005.09.017⟩. ⟨hal-00138653⟩

• Article dans une revue

Transformation of hydrogen silsesquioxane properties with RIE plasma treatment for advanced multiple-gate MOSFETs

J. Penaud, F. Fruleux, Emmanuel Dubois

Keeping in line with Moore's law requires increasing efforts in the development of alternative electronic devices. Multiple-gate transistors are very promising in order to suppress short-channel effects and to increase the current drive. Nevertheless, the fabrication of such devices represents…

Applied Surface Science, 2006, 253 (1), pp.395-399. ⟨10.1016/j.apsusc.2006.06.021⟩. ⟨hal-00138654⟩

• Article dans une revue

Tunable BST capacitor loss compensation using active circuit

Mahmoud Al Ahmad, Nathalie Rolland, Paul-Alain Rolland

The compensation of the ohmic and the material dielectric losses in a barium strontium titanate (BST) capacitor using an active circuit is reported in this letter. The negative resistance (NR) circuit creates an effective conductance of -|G n | which adds to the positive conductance of the passive…

IEEE Microwave and Wireless Components Letters, 2006, 16, pp.549-551. ⟨hal-00154924⟩