Publications

• Article dans une revue

Packaging methodology for RF devices using a BCB membrane transfert technique

S. Seok, N. Rolland, P.A. Rolland

Journal of Micromechanics and Microengineering, 2006, 16, pp.2384-2388. ⟨hal-00126798⟩

• Communication dans un congrès

Weak NLOS channel sounding

Michael Bocquet, Christophe Loyez, A. Benlarbi-Delaï

2006, pp.707-710. ⟨hal-00147513⟩

• Communication dans un congrès

Intégration des réseaux de câbles dans la simulation CEM automobile en hautes fréquence

Guillaume Andrieu, L. Kone, F. Bocquet, B. Demoulin, J.P. Parmentier

2006, pp.278-280. ⟨hal-00142607⟩

• Article dans une revue

Transformation of hydrogen silsesquioxane properties with RIE plasma treatment for advanced multiple-gate MOSFETs

J. Penaud, F. Fruleux, Emmanuel Dubois

Keeping in line with Moore's law requires increasing efforts in the development of alternative electronic devices. Multiple-gate transistors are very promising in order to suppress short-channel effects and to increase the current drive. Nevertheless, the fabrication of such devices represents…

Applied Surface Science, 2006, 253 (1), pp.395-399. ⟨10.1016/j.apsusc.2006.06.021⟩. ⟨hal-00138654⟩

• Article dans une revue

Fabrication and room-temperature single-charging behavior of self-aligned single-dot memory devices

Xing Tang, N. Reckinger, V. Bayot, Christophe Krzeminski, Emmanuel Dubois, A. Villaret, D.C. Bensahel

Self-aligned single-dot memory devices and arrays were fabricated based on arsenic-assisted etching and oxidation effects. The resulting device has a floating gate of about 5-10 nm, presenting single-electron memory operation at room temperature. In order to realize the final single-electron memory…

IEEE Transactions on Nanotechnology, 2006, 5 (6), pp.649-656. ⟨10.1109/TNANO.2006.883481⟩. ⟨hal-00138655⟩

• Article dans une revue

An optimal high contrast e-beam lithography process for the patterning of dense fin networks

F. Fruleux, J. Penaud, Emmanuel Dubois, M. Francois, M. Muller

There are many difficulties to overcome towards the integration of 10 nm CMOS technology. One such major challenge is to keep a tight control of the leakage current of devices while increasing the current drive at a reduced supply voltage. In this context, multi-gated structures, which are used to…

Materials Science and Engineering: C, 2006, 26 (5-7), pp.893-897. ⟨10.1016/j.msec.2005.09.017⟩. ⟨hal-00138653⟩

• Communication dans un congrès

A new BCB film zero-level packaging for RF devices

S. Seok, N. Rolland, P.A. Rolland

2006, pp.1118-1121. ⟨hal-00147516⟩

• Communication dans un congrès

High quality factors of silicon membranes with piezoelectric actuation and detection scheme for biosensing purpose in liquid media

Cédric Ayela, Thierry Leichle, C. Bergaud, Liviu Nicu, Eric Cattan, Caroline Soyer, M. Pugniere

2006, 6 pp. ⟨hal-00147730⟩

• Communication dans un congrès

Etude de structures du type couche sur substrat par laser ultrasons

M. Lemaire, Frédéric Jenot, Mohammadi Ouaftouh, Marc Duquennoy, Mohamed Ourak

Journées Ultrasons Laser, 2006, Le Mans, France. ⟨hal-00147743⟩

• Article dans une revue

Electroformation of giant liposomes in microfluidic channels

K. Kuribayashi, G. Tresset, P. Coquet, H. Fujita, S. Takeuchi

Measurement Science and Technology, 2006, 17, pp.3121-3126. ⟨10.1088/0957-0233/17/12/S01⟩. ⟨hal-00244016⟩