Publications

• COMM

Realization, characterization, and numerical modeling of dielectric elastomer films

J. Coutte, Bertrand Dubus, C. Granger, G. Haw

Proceedings of the 2005 International Workshop on Smart Materials and Structures, CanSmart 2005, 2005, Toronto, Ontario, Canada. ⟨hal-00131113⟩

• COMM

Microwave radiometry as a way to measure and control temperatures in medical applications

C. Ricard, Luc Dubois, L. Beghin, Pierre-Yves Cresson, J. Pribetich

Proceedings of the XXVIIIth General Assembly of URSI, 2005, New Delhi, India. ⟨hal-00131130⟩

• COMM

Potentials of perfluorinated polymer optical fibre operating at 850 nm in local area networks

A. Goffin, C. Lethien, C. Vloeberghs, Jean-Pierre Vilcot, Christophe Loyez

Proceedings of the XXVIIIth General Assembly of URSI, 2005, New Delhi, India. ⟨hal-00131128⟩

• COMM

Simple plasmon multiplexer

L. Dobrzynski, Maxime Beaugeois, Abdellatif Akjouj, Bahram Djafari-Rouhani, Jerome O. Vasseur, Yan Pennec, Mohamed Bouazaoui, Jean-Pierre Vilcot, Sophie Maricot, J.P. Vigneron

International Symposium on Photons and Phonons in Solids, 2005, Puebla, Mexico. ⟨hal-00130839⟩

• COMM

Characterization of vertical vibration of electrostatically actuated resonators using Atomic Force Microscope in noncontact mode

Vincent Agache, Bernard Legrand, K. Nakamura, H. Kawakatsu, Lionel Buchaillot, Hiroshi Toshiyoshi, Dominique Collard, Hiroyuki Fujita

Non contact mode atomic force microscope (AFM) direct characterization of out-of-plane fixed-fixed high frequency microelectromechanical resonators is examined while applying the excitation voltage to integrated electrostatic transducers. Non contact mode is rather used than contact mode in order…

The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005, Jun 2005, Seoul, South Korea. pp.2023-2026, ⟨10.1109/SENSOR.2005.1497499⟩. ⟨hal-00125631⟩

• COMM

RF blade nano-electromechanical resonator with self-aligned process for definition of lateral electrostatic transducers

Vincent Agache, Bernard Legrand, Dominique Collard, Hiroyuki Fujita, Lionel Buchaillot

In this paper, the design, fabrication, and characterization of a new class of electromechanical resonator based on a blade geometry is proposed. This particular geometry allows self-alignment of the mechanical resonator to its lateral electrodes with nanometer scale lateral gap (<50 nm), while…

Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2005, 2005, Montreux, Switzerland. pp.26-31. ⟨hal-00128656⟩

• COMM

The 2D feedback conveyance with ciliary actuator arrays

M. Ataka, Bernard Legrand, L. Buchaillot, D. Collard, H. Fujita

2005, pp.31-34. ⟨hal-00125659⟩

• ART

Modeling and experimental validation of sharpening mechanism based on thermal oxidation for fabrication of ultra-sharp silicon nanotips

Vincent Agache, Roger Ringot, Patrice Bigotte, Vincent Senez, Bernard Legrand, Lionel Buchaillot, Dominique Collard

This paper aims at modeling the thermal oxidation of silicon pillars leading to the formation of very sharp silicon tips. The model is used to determine optimum process parameters with respect to the initial shape of the silicon pillars and the geometry of the desired tip. The modeling concept is…

IEEE Transactions on Nanotechnology, 2005, 4, pp.548-556. ⟨10.1109/TNANO.2005.851386⟩. ⟨hal-00125632⟩

• COMM

Friction driven micromotors with both clockwise and counterclockwise rotations

Bernard Legrand, Lionel Buchaillot, Dominique Collard

This submission presents friction driven angular micro-motors that demonstrate both clockwise (CW) and counter clockwise (CCW) rotations with a single set of mechanical converters. Fabrication technology is based on surface micromachining of polycrystalline silicon layers in thin films. Rotor…

17e Congrès Français de Mécanique, 2005, Troyes, France. ⟨hal-04279573⟩

• COMM

Realization of millimeter-wave planar antennas on PDMS

Nicolas Tiercelin, P. Coquet, R. Sauleau, V. Senez, H. Fujita

2005, pp.1994-1997. ⟨hal-00130851⟩