Publications

• Communication dans un congrès

Schottky-barrier source-drain architecture for ultimate CMOS

Emmanuel Dubois, G. Larrieu, N. Breil, Xing Tang, N. Recklinger, V. Bayot, J. Knoch

SINANO Workshop, 2005, Grenoble, France. ⟨hal-00138409⟩

• Communication dans un congrès

TEM characterisation of accumulation low Schottky barrier MOSFET with PtSi contacts

A. Laszcz, J. Katcki, J. Ratajczak, A. Czerwinski, Emmanuel Dubois, G. Larrieu, X. Wallart

School on Materials Science and Electron Microscopy, Microscopy of Tomorrow's Industrial Materials, 2005, Berlin, Germany. ⟨hal-00138408⟩

• Article dans une revue

Ferroelectric active sensors

L. Cima, Denis Remiens

Sensors and Actuators A: Physical , 2005, 119, pp.120-127. ⟨hal-00138417⟩

• Article dans une revue

Thick films fabricated by laser ablation of PZT microparticles

G. Malyavanatham, D.T. O'Brien, M.F. Becker, W.T. Nichols, J.W. Keto, D. Kovar, S. Euphrasie, T. Loue, Philippe Pernod

Journal of Materials Processing Technology, 2005, 168, pp.273-279. ⟨hal-00138388⟩

• Article dans une revue

Comparison of in-plane actuation from a thin film and a bulk actuators

E. Fribourg-Blanc, M. Dupont, D. Osmont, Eric Cattan, Denis Remiens

Integrated Ferroelectrics, 2005, 69, pp.119-126. ⟨hal-00138420⟩

• Communication dans un congrès

Comparison of in-plane actuation from a thin film and a bulk actuators

E. Fribourg-Blanc, M. Dupont, D. Osmont, Eric Cattan, Denis Remiens

2005, pp.119-126. ⟨hal-00138427⟩

• Communication dans un congrès

Perfluorinated graded index polymer optical fibre used for the enhancement of the in buildings coverage of radiocellular signals

C. Lethien, A. Goffin, Jean-Pierre Vilcot, Christophe Loyez

2005, pp.357-360. ⟨hal-00130834⟩

• Communication dans un congrès

RF blade nano-electromechanical resonator with self-aligned process for definition of lateral electrostatic transducers

Vincent Agache, Bernard Legrand, Dominique Collard, Hiroyuki Fujita, Lionel Buchaillot

In this paper, the design, fabrication, and characterization of a new class of electromechanical resonator based on a blade geometry is proposed. This particular geometry allows self-alignment of the mechanical resonator to its lateral electrodes with nanometer scale lateral gap (<50 nm), while…

Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2005, 2005, Montreux, Switzerland. pp.26-31. ⟨hal-00128656⟩

• Communication dans un congrès

Realization of millimeter-wave planar antennas on PDMS

Nicolas Tiercelin, P. Coquet, R. Sauleau, V. Senez, H. Fujita

2005, pp.1994-1997. ⟨hal-00130851⟩

• Communication dans un congrès

Characterization of vertical vibration of electrostatically actuated resonators using Atomic Force Microscope in noncontact mode

Vincent Agache, Bernard Legrand, K. Nakamura, H. Kawakatsu, Lionel Buchaillot, Hiroshi Toshiyoshi, Dominique Collard, Hiroyuki Fujita

Non contact mode atomic force microscope (AFM) direct characterization of out-of-plane fixed-fixed high frequency microelectromechanical resonators is examined while applying the excitation voltage to integrated electrostatic transducers. Non contact mode is rather used than contact mode in order…

The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005, Jun 2005, Seoul, South Korea. pp.2023-2026, ⟨10.1109/SENSOR.2005.1497499⟩. ⟨hal-00125631⟩