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An original methodology to assess fatigue behavior in RF MEMS devices

O. Millet, Pierre Bertrand, Bernard Legrand, D. Collard, L. Buchaillot

European Microwave Week, 2004, Amsterdam, Netherlands. ⟨hal-00141031⟩

F. Conseil

2004. ⟨hal-00141010⟩

Philippe Basset, L. Buchaillot, A. Kaiser

VALLE M. Smart adaptive systems on silicon, Kluwer Academic Publishers, pp.253-268, 2004. ⟨hal-00137232⟩

F. Caron, J.C. Fourrier, Julien Carlier, V. Thomy, J.C. Camart, C. Druon, P. Tabourier

Actes du 2ème Congrès Français de Microfluidique, 2004, Toulouse, France. ⟨hal-00142068⟩

Virginie Degardin, M. Lienard, Pierre Degauque

2004, pp.195-199. ⟨hal-00142017⟩

M. Maazi, D. Glay, T. Lasri

Microwave and Optical Technology Letters, 2004, 43, pp.133-138. ⟨hal-00133929⟩

Maxime Beaugeois, L. Dobrzynski, Abdellatif Akjouj, Bahram Djafari-Rouhani, Jerome O. Vasseur, Mohamed Bouazaoui, Jean-Pierre Vilcot, J.P. Vigneron

GDR Ondes, 2004, Orsay, France. ⟨hal-00141207⟩

N. Michel

2004. ⟨hal-00141172⟩

T. Heim, D. Deresmes, Dominique Vuillaume

Journal of Applied Physics, 2004, 96, pp.2927-2936. ⟨10.1063/1.1769606⟩. ⟨hal-00140730⟩

C. Petit, G. Salace, D. Vuillaume

Journal of Applied Physics, 2004, 96, pp.5042-5049. ⟨hal-00140733⟩