Publications

• Communication dans un congrès

Thermally actuated probe arrays for manipulation and characterization of individual bio-cell

Beomjoon Kim, Dominique Collard, Matthieu Lagouge, F. Conseil, Bernard Legrand, Lionel Buchaillot

We introduce a new concept of thermal micro-actuators combined with electrical sensor device to capture and characterize individual living bio-cell. In our micro fabricated device, cantilevers integrated with sensing part (surface micro-machined poly-silicon) and actuation using the difference of…

TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Jun 2003, Boston, MA, United States. pp.1255-1258, ⟨10.1109/SENSOR.2003.1217000⟩. ⟨hal-00146460⟩

• Communication dans un congrès

Reliable micromechanical relay for use in rough environment

F. Conseil, P. Derdeiran, M.F. Ravat, D. Collard, L. Buchaillot

2003, pp.243-247. ⟨hal-00146459⟩

• Communication dans un congrès

Sommation optique de signaux hyperfréquences

N. Breuil, C. Fourdin, P. Nicole, G. Ulliac, Jean-Pierre Vilcot, J. Chazelas

2003, pp.6C-6. ⟨hal-00146559⟩

• Communication dans un congrès

Cymbal flextensional transducers. Biomedical arrays, design and fabrication studies

D. Markley, R. Newnham, R. Meyer, W.J. Hughes, N. Smith, S. Yip Lee, Anne-Christine Hladky

American Ceramic Society 105th Annual Meeting, 2003, Nashville,TN, United States. ⟨hal-00145964⟩

• Communication dans un congrès

Modélisation d'interconnexions submicroniques VLSI en présences des milieux environnants à pertes

K. El Bouazzati, Jean-François Legier, Erick Paleczny, Christophe Seguinot, Denis Deschacht

IES, 2003, Villeneuve d'Ascq, France. pp.2D-17. ⟨hal-00146561⟩

• Chapitre d'ouvrage

Metamorphic InAIAs/InGaAs HEMTs : material properties and device performance

Y. Cordier, S. Bollaert, M. Zaknoune, J.M. Chauveau, A. Cappy

CAI W.Z. III-V semiconductor heterostructures : physics and devices, Research Signpost, Kerala, India, pp.111-138, 2003. ⟨hal-00132383⟩

• Communication dans un congrès

Feedback of MEMS reliability study on the design stage : a step toward reliability aided design (RAD)

L. Buchaillot

14th European Symposium on Reliability of Electron Devices, Failure Physics and Analysis, ESREF 2003, 2003, Arcachon, France. ⟨hal-00146457⟩

• Communication dans un congrès

Physics-based process simulation of ultrashallow junctions

N.E.B. Cowern, B. Colombeau, R. Duffy, V. Venezia, C. Dachs, R. Lindsay, Fuccio Cristiano, E. Lampin, Alain Claverie

Ultra-Shallow Junctions Worshop, 2003, Santa Cruz, CA, United States. ⟨hal-00146422⟩

• Article dans une revue

About the measurements of the d33 piezoelectric coefficient of the PZT film-Si/SiO2/Ti/Pt substrates using an optical cryostat

J. Nosek, L. Burianova, M. Sulc, Caroline Soyer, Eric Cattan, Denis Remiens

Ferroelectrics, 2003, 292, pp.103-109. ⟨hal-00146464⟩

• Communication dans un congrès

Numerical analysis of the process induced stresses in silicon microstructures

V. Senez, T. Hoffmann, A. Armigliato, I. de Wolf

2003, pp.350-361. ⟨hal-00146444⟩